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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Schubert, Eva
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Topics
Publications (13/13 displayed)
- 2024In-cycle evolution of thickness and roughness parameters during oxygen plasma enhanced ZnO atomic layer deposition using in situ spectroscopic ellipsometry
- 2020Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometrycitations
- 2020Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometrycitations
- 2018Critical-point model dielectric function analysis of WO3 thin films deposited by atomic layer deposition techniquescitations
- 2016Anisotropy, band-to-band transitions, phonon modes, and oxidation properties of cobalt-oxide core-shell slanted columnar thin filmscitations
- 2015Structural and optical properties of cobalt slanted nanopillars conformally coated with few-layer graphenecitations
- 2015Optical anisotropy of porous polymer film with inverse slanted nanocolumnar structure revealed via generalized spectroscopic ellipsometrycitations
- 2012Nanomagnetic skyrmionscitations
- 2012Optical properties of cobalt slanted columnar thin films passivated by atomic layer depositioncitations
- 2012Aging Effects of As-deposited and Passivated Cobalt Slanted Columnar Thin Filmscitations
- 2011Length scales of interactions in magnetic, dielectric, and mechanical nanocompositescitations
- 2007Sub‐Wavelength Antireflection Coatings From Nanostructure Sculptured Thin Filmscitations
- 2005Ion beam sputter deposition of soft x-ray Mo∕Si multilayer mirrorscitations
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article
Optical properties of cobalt slanted columnar thin films passivated by atomic layer deposition
Abstract
<jats:p>Optical properties of passivated metal slanted columnar thin films from cobalt within the visible spectral region are reported. Glancing angle deposition is utilized to grow slanted nanocolumns which have been conformally coated with Al2O3 by a subsequent atomic layer deposition process. A generalized anisotropic Bruggeman effective medium approximation has been employed to analyze spectroscopic generalized ellipsometry data. The modified homogenization approach allows for determination of biaxial (monoclinic) optical and structural properties as well as fractions of three film constituents. The conformal alumina passivation layer preserves the pristine metal character of the nanostructures and prevents oxidation and aging effects.</jats:p>