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Yoder, R. B.
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document
Fabrication of a Prototype All‐Dielectric Micro‐Accelerator
Abstract
A laser‐powered micron‐scale, all‐dielectric, slab‐symmetric accelerator has been under development at UCLA for several years, with an experimental program underway. The device is built from dielectric Bragg reflectors and includes periodic nanoscale coupling structures, which requires micromanufacturing techniques and a cleanroom facility. We report here on results of fabrication experiments and the construction of a prototype device. A method for patterning the periodic coupling structures using electron beam lithography is described, and sputter deposition of thin films (such as ZrO2/SiO2) to create a distributed Bragg reflector is discussed. Future plan includes reflection and transmission measurements using the drive laser on prototype devices, and the resonance frequency and strength will be evaluated.