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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Liu, Yinong
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (35/35 displayed)
- 2022Pullout behaviour of shape memory alloy fibres in self-compacting concrete and its relation to fibre surface microtopography in comparison to steel fibrescitations
- 2019Nonuniform transformation behaviour of NiTi in a discrete geometrical gradient designcitations
- 2019Modelling and experimental investigation of geometrically graded shape memory alloys with parallel design configurationcitations
- 2018Effect of thermal annealing on stress relaxation and crystallisation of ion beam sputtered amorphous Si1-xGex thin filmscitations
- 2017Functionally graded shape memory alloyscitations
- 2017Experiments on deformation behaviour of functionally graded NiTi structurescitations
- 2016Investigation of Thermal Expansion Effects on Si-Based MEMS Structurescitations
- 2014Pseudoelastic behaviour of perforated NiTi shape memory plates under tensioncitations
- 2013Finite element computational modelling and experimental investigation of perforated NiTi plates under tensioncitations
- 2013Hystoelastic deformation behaviour of geometrically graded NiTi shape memory alloyscitations
- 2012Mechanical behaviour of architectured NiTi materials in complex loading
- 2011Assessment of tension-compression asymmetry of NiTi using circular bulge testing of thin platescitations
- 2011Modélisation numérique EF du comportement mécanique superélastique de plaques fines planes trouées en NiTi
- 2011Thermally induced damages of PECVD SiNx thin filmscitations
- 2011Etude expérimentale du comportement d'une tôle perforée aléatoirement en NiTi superélastique
- 2009Roundrobin SMA modelingcitations
- 2009Elastohysteresis : un modèle 3D phénoménologique précis pour le comportement superélastique d’Alliage à Mémoire de Forme sous chargements complexes
- 2008Gradient anneal of functionally graded NiTicitations
- 2008Effect of annealing on deformation-induced martensite stabilisation of NiTicitations
- 2008Effect of pseudoelastic cycling on the Clausius-Clapeyron relation for stress-induced martensitic transformation in NiTicitations
- 2007Poisson's Ratio of Low-Temperature PECVD Silicon Nitride Thin Filmscitations
- 2007Design of functionally graded NiTi by heat treatmentcitations
- 2007Process condition dependence of mechanical and physical properties of silicon nitride thin filmscitations
- 2006Hysteretic Behaviour of Ferroelasticity of NiTi in Shearcitations
- 2006Thermal Stability of PECVD SiN/sub x/ Filmscitations
- 2006Influence of Thermomechanical Processing on the Superelastic Properties of a Ni-Rich Nitinol Shape Memory Alloycitations
- 2006Effect of oxidation on the chemical bonding structure of PECVD SiN thin filmscitations
- 2005Characterization of Mechanical Properties of Silicon Nitride Thin Films for MEMS Devices by Nanoindentation
- 2005Effects of deposition temperature on the mechanical and physical properties of silicon nitride thin filmscitations
- 2005On the origin of Luders-like deformation of NiTi shape memory alloyscitations
- 2005Determination of mechanical properties of PECVD silicon nitride thin films for tunable MEMS Fabry-Perot optical filterscitations
- 2005Thermal processing of polycrystalline NiTi shape memory alloyscitations
- 2004Mechanistic simulation of thermomechanical behaviour of thermoelastic martensitic transformations in polycrystalline shape memory alloyscitations
- 2004Hysteretic behaviour of a Cu-Zn-Al single crystal during superelastic shear deformationcitations
- 2004Evaluation Of Elastic Modulus And Stress Gradient Of PECVD Silicon Nitride Thin Films
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article
Process condition dependence of mechanical and physical properties of silicon nitride thin films
Abstract
This study uses a resonance method to determine Young's modulus (E), shear modulus (G), and Poisson's ratio (nu) of plasma-enhanced chemical vapor deposited silicon nitride (SiNxHy) thin films deposited under varying process conditions. The resonance method involves exciting the bending and torsional vibration modes of a microcantilever beam fabricated from a film. The E and G values can be extracted directly from the bending and torsional vibration modes, and the nu value can be determined from the calculated E and G values. The density (rho) of the films was determined using a quartz crystal microbalance method. In order to determine the validity of the resonance method, finite element modeling was used to determine its dependence on microcantilever beam dimensions. Over a deposition temperature range of 100-300 degrees C, measured E, G, and nu values varied within 54-193 GPa, 22-77 GPa, and 0.20-0.26 with changes in process conditions, respectively. Over the same deposition range, measured rho values varied within 1.55-2.80 g/cm(3) with changes in process conditions.