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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Först, M.
Max Planck Institute for the Structure and Dynamics of Matter
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (6/6 displayed)
- 2017Multiple Supersonic Phase Fronts Launched at a Complex-Oxide Heterointerfacecitations
- 2007Electronic band gap of Si/SiO2 quantum wells: Comparison of ab initio calculations and photoluminescence measurementscitations
- 2006Residual stress in Si nanocrystals embedded in a SiO2 matrixcitations
- 2006Influence of excitonic singlet-triplet splitting on the photoluminescence of Si∕SiO2 multiple quantum wells fabricated by remote plasma-enhanced chemical-vapor depositioncitations
- 2005Fabrication of a Si∕SiO2 multiple-quantum-well light emitting diode using remote plasma enhanced chemical vapor depositioncitations
- 2000Phase change in Ge2Sb2Te5 films investigated by coherent phonon spectroscopycitations
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article
Residual stress in Si nanocrystals embedded in a SiO2 matrix
Abstract
<jats:p>Multiple quantum wells consisting of alternating Si and SiO2 layers were studied by means of Raman scattering. The structures were fabricated by the remote plasma enhanced chemical vapor deposition of amorphous Si and SiO2 layers on quartz substrate. The structures were subjected to a rapid thermal annealing procedure for Si crystallization. The obtained results suggest that the Si layers consist of nanocrystals embedded in an amorphous Si phase. It was found that the silicon nanocrystals inside 2nm thin layers are under high residual compressive stress. Moreover, the metastable Si III phase was detected in these samples supporting the presence of large compressive stresses in the structures. The compressive stress could be relaxed upon local laser annealing.</jats:p>