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Chi, D. Z.
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article
Texture of NiGe on Ge(001) and its evolution with formation temperature
Abstract
<jats:p>Texture of NiGe on Ge(001) and its evolution with formation temperature have been investigated. Pole figure investigation showed that NiGe formed by rapid thermal annealing of Ni(35nm)∕Ge(001) largely consists of epitaxial grains with orientation relationships: NiGe(111)[01¯1]∕∕Ge(001)[110],NiGe(020)[001]∕∕Ge(001)[100],NiGe(201)[102¯]∕∕Ge(001)[110],NiGe(211)[011¯]∕∕Ge(001)[110],NiGe(112)[201¯]∕∕Ge(001)[110], and NiGe(210)[001]∕∕Ge(001)[100]. For NiGe formed at 400 °C, NiGe(111)[01¯1]∕∕Ge(001)[110],NiGe(020)[001]∕∕Ge(001)[100],NiGe(201)[102¯]∕∕Ge(001)[110], and NiGe(211)[011¯]∕∕Ge(001)[110] were found to be the preferred orientations, while NiGe formed at 600 °C was dominated by NiGe grains with NiGe(111)[01¯1]∕∕Ge(001)[110] orientation. The increasing dominance of the grains with NiGe(111)[01¯1]∕∕Ge(001)[110] orientation is attributed to the minimum lattice mismatch with this orientation.</jats:p>