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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Liu, Yinong
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (35/35 displayed)
- 2022Pullout behaviour of shape memory alloy fibres in self-compacting concrete and its relation to fibre surface microtopography in comparison to steel fibrescitations
- 2019Nonuniform transformation behaviour of NiTi in a discrete geometrical gradient designcitations
- 2019Modelling and experimental investigation of geometrically graded shape memory alloys with parallel design configurationcitations
- 2018Effect of thermal annealing on stress relaxation and crystallisation of ion beam sputtered amorphous Si1-xGex thin filmscitations
- 2017Functionally graded shape memory alloyscitations
- 2017Experiments on deformation behaviour of functionally graded NiTi structurescitations
- 2016Investigation of Thermal Expansion Effects on Si-Based MEMS Structurescitations
- 2014Pseudoelastic behaviour of perforated NiTi shape memory plates under tensioncitations
- 2013Finite element computational modelling and experimental investigation of perforated NiTi plates under tensioncitations
- 2013Hystoelastic deformation behaviour of geometrically graded NiTi shape memory alloyscitations
- 2012Mechanical behaviour of architectured NiTi materials in complex loading
- 2011Assessment of tension-compression asymmetry of NiTi using circular bulge testing of thin platescitations
- 2011Modélisation numérique EF du comportement mécanique superélastique de plaques fines planes trouées en NiTi
- 2011Thermally induced damages of PECVD SiNx thin filmscitations
- 2011Etude expérimentale du comportement d'une tôle perforée aléatoirement en NiTi superélastique
- 2009Roundrobin SMA modelingcitations
- 2009Elastohysteresis : un modèle 3D phénoménologique précis pour le comportement superélastique d’Alliage à Mémoire de Forme sous chargements complexes
- 2008Gradient anneal of functionally graded NiTicitations
- 2008Effect of annealing on deformation-induced martensite stabilisation of NiTicitations
- 2008Effect of pseudoelastic cycling on the Clausius-Clapeyron relation for stress-induced martensitic transformation in NiTicitations
- 2007Poisson's Ratio of Low-Temperature PECVD Silicon Nitride Thin Filmscitations
- 2007Design of functionally graded NiTi by heat treatmentcitations
- 2007Process condition dependence of mechanical and physical properties of silicon nitride thin filmscitations
- 2006Hysteretic Behaviour of Ferroelasticity of NiTi in Shearcitations
- 2006Thermal Stability of PECVD SiN/sub x/ Filmscitations
- 2006Influence of Thermomechanical Processing on the Superelastic Properties of a Ni-Rich Nitinol Shape Memory Alloycitations
- 2006Effect of oxidation on the chemical bonding structure of PECVD SiN thin filmscitations
- 2005Characterization of Mechanical Properties of Silicon Nitride Thin Films for MEMS Devices by Nanoindentation
- 2005Effects of deposition temperature on the mechanical and physical properties of silicon nitride thin filmscitations
- 2005On the origin of Luders-like deformation of NiTi shape memory alloyscitations
- 2005Determination of mechanical properties of PECVD silicon nitride thin films for tunable MEMS Fabry-Perot optical filterscitations
- 2005Thermal processing of polycrystalline NiTi shape memory alloyscitations
- 2004Mechanistic simulation of thermomechanical behaviour of thermoelastic martensitic transformations in polycrystalline shape memory alloyscitations
- 2004Hysteretic behaviour of a Cu-Zn-Al single crystal during superelastic shear deformationcitations
- 2004Evaluation Of Elastic Modulus And Stress Gradient Of PECVD Silicon Nitride Thin Films
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article
Effects of deposition temperature on the mechanical and physical properties of silicon nitride thin films
Abstract
This study investigates the mechanical and physical properties of low-temperature plasma-enhanced chemical-vapor-deposited silicon nitride thin films, with particular respect to the effect of deposition temperature. The mechanical properties of the films were evaluated by both nanoindentation and microcantilever beam-bending techniques. The cantilever beam specimens were fabricated from silicon nitride thin films deposited on (100) silicon wafer by bulk micromachining. The density of the films was determined from quartz crystal microbalance measurements, as well as from the resonant modes of the cantilever beams, which were mechanically excited using an atomic force microscope. It was found that both the Young's modulus and density of the films were significantly reduced with decreasing deposition temperature. The decrease in Young's modulus is attributed to the decreasing material density. The decrease in density with decreasing deposition temperature is believed to be due to the slower diffusion rates of the deposited species, which retarded the densification of the film during the deposition process. (c) 2005 American Institute of Physics.