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Droopad, R.
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article
Epitaxial BiFeO 3 thin films on Si
Abstract
The growth of epitaxial BiFeO <sub>3</sub> (BFO) thin films on Si substrate using pulsed laser deposition with SrTiO <sub>3</sub> (STO) as a template layer and SrRuO <sub>3</sub> (SRO) as a bottom electrode was investigated. The structure of the film was investigated using x-ray diffraction and transmission electron microscopy. It was observed that the value of spontaneous polarization of the films was ∼45 μC/Cm <sup>2</sup>. The results show that the 400-nm-thick films has a large piezoelectric coefficient of ∼120 pm/V, which is useful to applications in actuators and microelectromechanical (MEMS) devices.