• Yoo, Y.-Z.
• Nakajima, K.
• Chikyow, T.
• Konishi, Y.
• Yonezawa, Y.
• Song, J. H.
• Jin, Zheng-Wu
• Koinuma, H.
• Ahmet, P.

Abstract

<jats:p>Sulfide was employed as a buffer layer for the growth of SrTiO3 (STO) thin films on Si. In order to utilize a relationship of a 45° rotational lattice match between Si and STO, ZnS, with almost the same lattice constant as Si, was used as the buffer. The buffer layer showed a partially disordered region at the ZnS/Si interface, owing to steady interdiffusion between ZnS and Si. STO film on ZnS buffered Si showed the rotational epitaxy with respect to Si and sharp STO/ZnS interface. Propagation of stacking faults from the ZnS/Si interface was observed, but those plane defects were terminated at the rotational STO/ZnS interface, resulting in high-quality STO films. The dielectric constant of the STO/ZnS film was 34.</jats:p>

Topics

• thin film
• dielectric constant
• defect
• stacking fault
• interdiffusion