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Shiraishi, N.
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article
Local probing of thermal properties at submicron depths with megahertz photothermal vibrations.
Abstract
We demonstrate the imaging of buried features in a microstructure—a tiny hole in an aluminum thin film covered by a chromium layer—with nanometer lateral resolution using a transient temperature distribution restricted to within ~0.5 µm of the sample surface. This is achieved by mapping photothermally induced megahertz surface vibrations in an atomic force microscope. Local thermal probing with megahertz-frequency thermal waves is thus shown to be a viable method for imaging subsurface thermal features at submicron depths. ©2003 American Institute of Physics.