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Publications (9/9 displayed)
- 2010Thickness effect on the dielectric, ferroelectric, and piezoelectric properties of ferroelectric lead zirconate titanate thin filmscitations
- 2006Optimization of the fabrication parameters of PZT 52/48 thin films by pulsed laser ablationcitations
- 2004Bottom electrode crystallization method for heat treatments on thin filmscitations
- 2003Barium metaplumbate thin film electrodes for ferroelectric devicescitations
- 2003Simple method for crystallizing ceramic thin films using platinum bottom electrodes as resistive heating elementscitations
- 2003Pulsed laser deposition of barium metaplumbate thin films for ferroelectric capacitorscitations
- 2003Deposition of bioactive glass-ceramic thin-films by RF magnetron sputteringcitations
- 2002Interactions at zirconia-Au-Ti interfaces at high temperaturescitations
- 2002Optical fiber interferometer for measuring the d(33) coefficient of piezoelectric thin films with compensation of substrate bendingcitations
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article
Optical fiber interferometer for measuring the d(33) coefficient of piezoelectric thin films with compensation of substrate bending
Abstract
An optical fiber interferometer for measuring the d(33) coefficient of piezoelectric samples is described. Its configuration is based on the Mach-Zehnder interferometer, and a double incidence on the thin-film samples successfully suppresses the undesirable bending effect of the substrate. Detection of the small displacement is based on an active homodyne scheme. Results are reported for a bulk piezoelectric transducer (PZT) sample and a PZT thin-film incorporated in a microactuator. (C) 2002 American Institute of Physics.