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article
Optical fiber interferometer for measuring the d(33) coefficient of piezoelectric thin films with compensation of substrate bending
Abstract
An optical fiber interferometer for measuring the d(33) coefficient of piezoelectric samples is described. Its configuration is based on the Mach-Zehnder interferometer, and a double incidence on the thin-film samples successfully suppresses the undesirable bending effect of the substrate. Detection of the small displacement is based on an active homodyne scheme. Results are reported for a bulk piezoelectric transducer (PZT) sample and a PZT thin-film incorporated in a microactuator. (C) 2002 American Institute of Physics.