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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Kreupl, Franz
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (21/21 displayed)
- 2020Patterning Platinum by Selective Wet Etching of Sacrificial Pt-A1 Alloycitations
- 2019Graphenic carbon as etching mask: patterning with laser lithography and KOH etching
- 2019Highly Reliable Contacts to Silicon Enabled by Low Temperature Sputtered Graphenic Carbon
- 2018Carbon Wonderland from an Engineering Perspective
- 2017Graphenic Carbon: A Novel Material to Improve the Reliability of Metal-Silicon Contactscitations
- 2016Graphenic Carbon-Silicon Contacts for Reliability Improvement of Metal-Silicon Junctions
- 2016Graphenic carbon-silicon contacts for reliability improvement of metal-silicon junctionscitations
- 2015Trap passivation in memory cell with metal oxide switching element
- 2013TRAP PASSIVATION IN MEMORY CELL WITH METAL OXIDE SWITCHING ELEMENT
- 2013Low-Resistivity Long-Length Horizontal Carbon Nanotube Bundles for Interconnect Applications—Part I: Process Developmentcitations
- 2012Integrated circuit including doped semiconductor line having conductive cladding
- 2011Integrated circuit including doped semiconductor line having conductive cladding
- 2010INTEGRATED CIRCUIT INCLUDING DOPED SEMICONDUCTOR LINE HAVING CONDUCTIVE CLADDING
- 2009Integrated circuit including doped semiconductor line having conductive cladding
- 2007Silicon to nickel‐silicide axial nanowire heterostructures for high performance electronicscitations
- 2004High-current nanotube transistorscitations
- 2004Catalytic CVD of SWCNTs at Low Temperatures and SWCNT Devices
- 2004Chemical Vapor Deposition Growth of Single-Walled Carbon Nanotubes at 600 °C and a Simple Growth Modelcitations
- 2003Contact improvement of carbon nanotubes via electroless nickel depositioncitations
- 2001Method for fabricating an integrated circuit having at least one metallization plane
- 2001Template grown multiwall carbon nanotubes
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document
Template grown multiwall carbon nanotubes
Abstract
A range of pure metal and metal compound catalysts have been investigated for chemical vapor deposition (CVD) growth of multi-walled carbon nanotubes on silicon oxide substrates under various conditions. Catalysts including iron, cobalt and nickel and their carbonyl, chloride, oxalate and acetylacetonate compounds deposited on SiO2 substrates were prepared and reduced in flowing hydrogen prior to nanotube growth from hydrogen and acetylene at temperatures ranging from 500 to 750 °C. The highest quality nanotubes were grown from elemental iron and iron compound catalysts at temperatures around 700 °C.