| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Gyorgy, Eniko
Ministerio de Ciencia e Innovación
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2023Boron and nitrogen co-doped carbon-based nanomaterials/nickel oxide/hydroxide hybrids for sunlight induced photocatalytic water cleaningcitations
- 2023Temperature-modulated synthesis of vertically oriented atomic bilayer graphene nanowalls grown on stainless steel by inductively coupled plasma chemical vapour depositioncitations
- 2023Functional enhancement of laser deposited carbon-based supercapacitor electrodes upon post-annealing treatmentcitations
- 2021Laser synthesis of NixZnyO/reduced graphene oxide/carbon nanotube electrodes for energy storage applications
- 2017MAPLE synthesis of reduced graphene oxide/silver nanocomposite electrodes: Influence of target composition and gas ambiencecitations
- 2016Titanium oxide – reduced graphene oxide – silver composite layers synthesized by laser technique: Wetting and electrical propertiescitations
- 2016Direct multipulse laser processing of titanium oxide–graphene oxide nanocomposite thin filmscitations
- 2015One-step preparation of nitrogen doped titanium oxide/Au/reduced graphene oxide composite thin films for photocatalytic applicationscitations
- 2014Ultraviolet pulsed laser irradiation of multi-walled carbon nanotubes in nitrogen atmospherecitations
- 2012Hybrid dextran-iron oxide thin films deposited by laser techniques for biomedical applicationscitations
- 2012Biomedical properties and preparation of iron oxide-dextran nanostructures by MAPLE techniquecitations
- 2011Synthesis and characterization of Ag nanoparticles and Ag-loaded TiO2 photocatalystscitations
- 2011Tunable optical and nano-scale electrical properties of WO3 and Ag-WO3 nanocomposite thin filmscitations
- 2001Role of laser pulse duration and gas pressure in deposition of AlN thin filmscitations
Places of action
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article
Role of laser pulse duration and gas pressure in deposition of AlN thin films
Abstract
<jats:p>We investigated the relative merits and limits of pulsed laser deposition from AlN targets in vacuum and low-pressure nitrogen in obtaining stoichiometric and crystalline aluminum nitride thin films. We used two UV excimer laser sources (λ=248 nm): a nanosecond system (τFWHM=30 ns) and, a subpicosecond (τFWHM=450 fs) system. The obtained structures were characterized by x-ray diffraction, electron microscopy in cross section, selected area electron diffraction, and profilometry. We demonstrated that the best results are obtained with the sub-ps laser source in vacuum and in low pressure nitrogen when the AlN thin films are very pure, crystalline, clearly exhibiting a tendency to epitaxy. Metallic Al is present in the films deposited with the ns laser source. We believe this is an effect of the gradual decomposition of AlN inside the crater on the target surface under multipulse laser irradiation.</jats:p>