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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Petrov, R. H. | Madrid |
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| Bih, L. |
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| Casati, R. |
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| Kočí, Jan | Prague |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Furumochi, T.
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article
High-temperature goniometer for thin film growth and ion scattering studies
Abstract
<jats:p>We have developed a laser-heated six-axis goniometer for oxide thin film growth and ion scattering studies. The goniometer requires only a single CF152 flange for mounting in a vacuum chamber and includes three positioning and three rotational degrees of freedom. All translation and rotation axes are decoupled. A sample with a maximum size of 10 mm×10 mm can be heated to 1200 °C in a pure oxygen environment. The heating source is a 300 W continuous wave Nd:YAG laser. Light from the laser is brought to the sample stage with a combination of flexible and rigid optical fibers. The goniometer includes a motorized manipulator for two ablation targets, making it possible to grow thin films by pulsed laser ablation. Film growth and surface structure can be monitored by reflection high-energy electron diffraction and coaxial impact collision ion scattering spectroscopy. Samples can also be transferred from the goniometer to a room-temperature scanning tunneling microscope inside the vacuum chamber.</jats:p>