| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Mackova, Anna
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (10/10 displayed)
- 2024Patterning of COC Polymers by Middle‐Energy Ion Beams for Selective Cell Adhesion in Microfluidic Devicescitations
- 2022Compositional and Structural Modifications by Ion Beam in Graphene Oxide for Radiation Detection Studiescitations
- 2022Compositional and Structural Modifications by Ion Beam in Graphene Oxide for Radiation Detection Studiescitations
- 2022The multi-energetic Au ion implantation of graphene oxide and polymerscitations
- 2022One-step 3D microstructuring of PMMA using MeV light ionscitations
- 2015Structure and Plasmonic Properties of Thin PMMA Layers with Ion-Synthesized Ag Nanoparticlescitations
- 2006Growth and modification of organosilicon films in PECVD and remote afterglow reactorscitations
- 2004Radiation-Induced Change of Polyimide Properties under High-Fluence and High Ion Current Density Implantation
- 2003Compositional alteration of polyimide under high fluence implantation by Co+ and Fe+ ionscitations
- 2002Anomalous Depth Distribution of Fe and Co Atoms in Polyimide Implanted to High Fluencecitations
Places of action
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article
One-step 3D microstructuring of PMMA using MeV light ions
Abstract
<jats:p>The conventional procedure for creating 3D microstructures in resists by ion beam lithography consists of two stages – exposure and developing. However, single stage of manufacturing 3D structures in resist is also possible. Irradiation of PMMA can cause it to shrink. This feature of the polymer can be used for one-step three-dimensional microstructuring, which simplifies the manufacturing process. The shrinkage of PMMA film on a substrate has been extensively studied, while research on free-standing film is not comprehensive. The use of free-standing PMMA film allows the creation of a flexible material with 3D microstructures, which can be used in medicine, optics, and electronics. The question here is whether the results obtained for the PMMA film on the substrate are applicable to the freestanding film. Since the nature of shrinking is outgassing of volatile products, the film on the substrate has only one surface for the release of gases, while in the free-standing film, gases can be released from the sample from both sides. Therefore, the shrinking in the free-standing film occurs on both sides. The aim of this work is to study the shrinkage of the free-standing film and compare it with that of the film of the same thickness coated on the substrate.</jats:p>