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Hutchings, David
University of Glasgow
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (5/5 displayed)
- 2018Sputter-deposited magneto-optical garnet thin films for all-mode Faraday rotatorscitations
- 2014Characterization and optimization of ion implantation for high spatial resolution quantum well intermixing in GaAs/AlGaAs superlatticescitations
- 2013Quasi-phase-matched Faraday rotation in semiconductor waveguides with a magnetooptic cladding for monolithically integrated optical isolatorscitations
- 2011Quasi-phase matching magneto-optical waveguidescitations
- 2007Enabling technologies for the monolithic integration of semiconductor lasers and waveguide optical isolators
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article
Characterization and optimization of ion implantation for high spatial resolution quantum well intermixing in GaAs/AlGaAs superlattices
Abstract
Processes to achieve high spatial resolution ion implantation induced quantum well intermixing in GaAs/AlGaAs superlattices have been developed. Ion implantation has been carried out using various doses of 4 MeV As2+ ion beam, followed by rapid thermal annealing at various temperatures for 60 s. Low temperature photoluminescence measurements reveal a blue-shift up to 90 nm in the energy band-gap. Propagation losses have been characterized in the intermixed waveguides, and losses as low as 0.55 cm−1 have been observed for 0.5×1013 cm−2 implantation dose which gives a blue-shift of 68 nm when annealed at 775◦C. The spatial resolution of ∼1.2 μm has been observed at the depth of 2 μm inside the epitaxial structure.