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article
Development of nanostructures for thermoelectric microgenerators using ion-track lithography
Abstract
A novel fabrication process for nanostructures for thermoelectric microgenerators, based on a combination of a traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography, is discussed. Ion-track etched polyimide nanotemplates (30–80 nm pore diameters) are used to grow Bi<sub>2</sub>Te<sub>3</sub> nanowires by electroplating.The Bi<sub>2</sub>Te<sub>3</sub> film’s microstructural and thermoelectric propertiesare reported.