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Publications (7/7 displayed)
- 2020Four-port integrated waveguide coupler exploiting bi-directional propagation of two single-mode waveguides
- 2017Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process stepcitations
- 2007Line defects and temperature effects in liquid crystal tunable planar Bragg gratingscitations
- 2005Direct UV writing for channel definition on FHD silica-on-silicon
- 2004Photosensitive properties of a tin-doped sodium silicate glass for direct ultraviolet writingcitations
- 2003Direct-UV writing of channel waveguides in a bulk photosensitive tin doped sodium silicate glass
- 2003Integrated optical structures written in a polymer film by UV-induced refractive index modification
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article
Ductile dicing of LiNbO3 ridge waveguide facets to achieve 0.29 nm surface roughness in single process step
Abstract
A single-step ductile dicing process capable of manufacturing optical quality facets in lithium niobate (LiNbO<sub>3</sub>) ridge waveguides with an average surface roughness of 0.29 nm is reported. This result is comparable with surface roughnesses achieved by lapping and polishing and represents an order of magnitude improvement over the prior state of the art in LiNbO<sub>3</sub> waveguide facet dicing.