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Talaikis, Martynas
Center for Physical Sciences and Technology
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article
The direct growth of planar and vertical graphene on Si(100) <i>via</i> microwave plasma chemical vapor deposition: synthesis conditions effects
Abstract
<jats:p>In the present research, graphene was synthesized directly on a Si(100) substrate <jats:italic>via</jats:italic> combining direct microwave plasma-enhanced chemical vapor deposition and protective enclosure.</jats:p>