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Guzenko, Vitaliy A.
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Publications (3/3 displayed)
- 2020Metal assisted chemical etching of silicon in the gas phase: a nanofabrication platform for X-ray opticscitations
- 2019Fabrication of Au gratings by seedless electroplating for X-ray grating interferometrycitations
- 2016Electron-beam lithographic grafting of functional polymer structures from fluoropolymer substratescitations
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article
Metal assisted chemical etching of silicon in the gas phase: a nanofabrication platform for X-ray optics
Abstract
<p>Gas-MacEtch of Si with a Pt catalyst allows vertical etching nanostructures with an extreme aspect ratio up to 10 000 : 1.</p>