People | Locations | Statistics |
---|---|---|
Naji, M. |
| |
Motta, Antonella |
| |
Aletan, Dirar |
| |
Mohamed, Tarek |
| |
Ertürk, Emre |
| |
Taccardi, Nicola |
| |
Kononenko, Denys |
| |
Petrov, R. H. | Madrid |
|
Alshaaer, Mazen | Brussels |
|
Bih, L. |
| |
Casati, R. |
| |
Muller, Hermance |
| |
Kočí, Jan | Prague |
|
Šuljagić, Marija |
| |
Kalteremidou, Kalliopi-Artemi | Brussels |
|
Azam, Siraj |
| |
Ospanova, Alyiya |
| |
Blanpain, Bart |
| |
Ali, M. A. |
| |
Popa, V. |
| |
Rančić, M. |
| |
Ollier, Nadège |
| |
Azevedo, Nuno Monteiro |
| |
Landes, Michael |
| |
Rignanese, Gian-Marco |
|
Jancelewicz, Mariusz Andrzej
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (4/4 displayed)
- 2016Enhancement of optical and mechanical properties of Si nanopillars by ALD TiO<inf>2</inf>coatingcitations
- 2015Tailoring the structural, optical, and photoluminescence properties of porous silicon/TiO<inf>2</inf> nanostructurescitations
- 2015Structural and XPS characterization of ALD Al<inf>2</inf>O<inf>3</inf> coated porous siliconcitations
- 2010Molecular dynamics in grafted polydimethylsiloxanescitations
Places of action
Organizations | Location | People |
---|
article
Enhancement of optical and mechanical properties of Si nanopillars by ALD TiO<inf>2</inf>coating
Abstract
<p>The mechanical and optical properties of Si and TiO<sub>2</sub>-Si nanopillars (NPl) were investigated. Mesoporous silicon NPl arrays were fabricated by metal-assisted chemical etching and nanosphere lithography, and then pillars were covered by TiO<sub>2</sub> using the atomic layer deposition technique. We performed scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), energy dispersive X-ray spectroscopy (EDX), Raman spectroscopy, reflectance, photoluminescence (PL) spectroscopy and nanoindentation to characterize the as-prepared and annealed TiO<sub>2</sub>-Si NPl. The main structural and mechanical parameters of TiO<sub>2</sub>-Si NPl (grain size, strain, critical load, elastic recovery and Young's module) were calculated. Reflectance and PL spectroscopy were used to study the impact of morphology on optical properties of TiO<sub>2</sub>-Si NPl before and after annealing. It was established that the nanostructures of TiO<sub>2</sub> penetrated inside the porous matrix of Si pillar improve the mechanical properties of TiO<sub>2</sub>-Si NPl. The results of nanoindentation study have shown that Young's modulus of annealed TiO<sub>2</sub>-Si NPl is about three times higher than for the pure Si NPl.</p>