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Pavlenko, M.
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article
Enhancement of optical and mechanical properties of Si nanopillars by ALD TiO<inf>2</inf>coating
Abstract
<p>The mechanical and optical properties of Si and TiO<sub>2</sub>-Si nanopillars (NPl) were investigated. Mesoporous silicon NPl arrays were fabricated by metal-assisted chemical etching and nanosphere lithography, and then pillars were covered by TiO<sub>2</sub> using the atomic layer deposition technique. We performed scanning electron microscopy (SEM), transmission electron microscopy (TEM), X-ray diffraction (XRD), energy dispersive X-ray spectroscopy (EDX), Raman spectroscopy, reflectance, photoluminescence (PL) spectroscopy and nanoindentation to characterize the as-prepared and annealed TiO<sub>2</sub>-Si NPl. The main structural and mechanical parameters of TiO<sub>2</sub>-Si NPl (grain size, strain, critical load, elastic recovery and Young's module) were calculated. Reflectance and PL spectroscopy were used to study the impact of morphology on optical properties of TiO<sub>2</sub>-Si NPl before and after annealing. It was established that the nanostructures of TiO<sub>2</sub> penetrated inside the porous matrix of Si pillar improve the mechanical properties of TiO<sub>2</sub>-Si NPl. The results of nanoindentation study have shown that Young's modulus of annealed TiO<sub>2</sub>-Si NPl is about three times higher than for the pure Si NPl.</p>