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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Hu, Yang
Technical University of Denmark
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (10/10 displayed)
- 2023Synthesis and Structure Stabilization of Disordered Rock Salt Mn/V-Based Oxyfluorides as Cathode Materials for Li-Ion Batteries
- 2023Machine learning of twin/matrix interfaces from local stress field
- 2021Ionic conductivity in LixTaOy thin films grown by Atomic Layer Deposition (ALD)citations
- 2020Ionic conductivity in LixTaOy thin films grown by atomic layer depositioncitations
- 2020Polybenzimidazole-Based High-Temperature Polymer Electrolyte Membrane Fuel Cells: New Insights and Recent Progresscitations
- 2020Polybenzimidazole-Based High-Temperature Polymer Electrolyte Membrane Fuel Cells: New Insights and Recent Progresscitations
- 2020Process for producing metal alloy nanoparticles
- 2018Understanding Capacity Fading of MgH2 Conversion-Type Anodes via Structural Morphology Changes and Electrochemical Impedancecitations
- 2017Electrical characterization of amorphous LiAlO2 thin films deposited by atomic layer depositioncitations
- 2016Electrical characterization of amorphous LiAlO2 thin films deposited by atomic layer depositioncitations
Places of action
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article
Electrical characterization of amorphous LiAlO2 thin films deposited by atomic layer deposition
Abstract
<p>LiAlO2 thin films deposited by atomic layer deposition (ALD) have a potential application as an electrolyte in three-dimensional (3D) all-solid-state microbatteries. In this study, Li-ion conductivity of such films is investigated by both in-plane and cross-plane methods. LiAlO2 thin films with a Li composition of [Li]/([Li] + [Al]) = 0.46 and an amorphous structure were grown by ALD with thicknesses of 90, 160 and 235 nm on different substrates. The electrical characterization was conducted by impedance spectroscopy using inert electrodes over a temperature range of 25-200 degrees C in an inert atmosphere. In-plane conductivities were obtained from films on insulating sapphire substrates, whereas cross-plane conductivities were measured from films on conducting titanium substrates. For the first time, comparison of the in-plane and cross-plane conductivities in these ALD LiAlO2 films has been achieved. More comparable results are obtained using a cross-plane method, whereas in-plane conductivity measurements demonstrate a considerable thickness-dependence with thinner film thickness. The room-temperature conductivity of the LiAlO2 films has been determined to be in the order of 10(-10) S cm(-1) with an activation energy of ca. 0.8 eV.</p>