| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Cheneler, David
Lancaster University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (15/15 displayed)
- 2024Manufacture and calibration of high stiffness AFM cantilevers
- 2021Manufacture and calibration of high stiffness AFM cantilevers
- 2021Different approaches for manufacturing ti-6al-4v alloy with triply periodic minimal surface sheet-based structures by electron beam meltingcitations
- 2020Manufacture and calibration of high stiffness AFM cantilevers
- 2020Measurement and modelling of the elastic defection of novel metal syntactic foam composite sandwich structures in 3-point bendingcitations
- 2020The impact of post manufacturing treatment of functionally graded Ti6Al4V scaffolds on their surface morphology and mechanical strengthcitations
- 2020A fast and portable imager for neutron and gamma emitting radionuclidescitations
- 2019Surface temperature equalisation through automated laser vaporisation of thick film electrical heating elements
- 2017Liquid-like behaviour of gold nanowire bridgescitations
- 2016On the origin and magnitude of surface stresses due to metal nanofilmscitations
- 2014Transient bioimpedance monitoring of mechanotransduction in artificial tissue during indentationcitations
- 2013NEMS based tactile sensing in an artificial finger
- 2013Spherical indentation analysis of stress relaxation for thin film viscoelastic materialscitations
- 2013Degradation of polymer filmscitations
- 2011Characteristics and durability of fluoropolymer thin filmscitations
Places of action
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article
On the origin and magnitude of surface stresses due to metal nanofilms
Abstract
Metallisation is a vital process for micro- and nanofabrication, allowing the controlled preparation of material surfaces with thin films of a variety of metals. The films are often subjected to further processing, including etching, patterning, chemical modification, and additional lamination. The extensive applications of metallised substrates include chemical sensors and nanoelectronics. Here, we report an experimental study of the metallization of silicon cantilevers with nano-films of chromium and titanium. Analysis of the stress distribution throughout the cantilever showed that metallisation causes a constant stress along the length of the beam, which can be calculated from interferometric quantification of the beam curvature. The structure of the metal/silicon interface was imaged using electron microscopy in an attempt to ascertain the physical origin of the stress. A theoretical model is constructed for the stressed beam system, and it is shown that there is no single parameter that can describe the change in stress. The resultant structure after deposition varies significantly for each metal, which gives rise to a variety of stress directions and magnitudes.