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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Lemaire, Etienne
Université de Tours
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (10/10 displayed)
- 2024Design, Simulation and Analysis of a LowTech Capacitive Micromachined Ultrasonic Transducer (CMUT)
- 2022Exploring the mechanical performance of BaTiO3 filled HDPE nanocomposites: A comparative study of the experimental and numerical approachescitations
- 2021Rochelle Salt-Based Ferroelectric and Piezoelectric Composite Produced with Simple Additive Manufacturing Techniquescitations
- 2015Fast fabrication process of low environmental impact MEMScitations
- 2015Advanced thermo-mechanical characterization of organic materials by piezoresistive organic resonatorscitations
- 2014Effect of hydrodynamic force on microcantilever vibrations: applications to liquid-phase chemical sensingcitations
- 2013Contribution to the development of integrated viscoelasticity sensor
- 2013Contribution au développement de microcapteurs intégrés de viscoélasticité de fluides
- 2012The Microcantilever: a Versatile Tool for Measuring the Rheological Properties of Complex Fluidscitations
- 2011The Microcantilever: a Versatile Tool for Measuring Fluid Properties
Places of action
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article
Advanced thermo-mechanical characterization of organic materials by piezoresistive organic resonators
Abstract
We present the piezoresistive transduction of an all-organic microelectromechanical (MEMS) resonant sensor fabricated through a low-cost and highly versatile process. The MEMS resonator consists of a U-shaped cantilever beam resonator made of a thin layer of a piezoresistive nanocomposite (SU/8 epoxy resin filled with industrially produced carbon nanotubes, or CNTs) deposited on flexible substrates such as polyethylene terephthalate (PET), polyethylene naphthalate (PEN) and paper. The structures have been fabricated using a commercially available vinyl cutting machine. External piezoelectric actuation has been used to drive the devices into resonance while integrated piezoresistive transduction has been chosen as the resonance sensing approach. The achieved measurements validate the concept of dynamic piezoresistive-transduced organic MEMS. Sensitivity to temperature compares with that of state-of-the-art inorganic temperature sensors, thus confirming the high accuracy level of the new resonators. As an example of a sensing application, the present MEMS are employed as microdynamical mechanical analyzers enabling the rapid, low-cost and accurate characterization of the viscoelastic properties of organic materials.