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Bomer, Johan G.
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Publications (7/7 displayed)
- 2017Sensing oxygen at the millisecond time-scale using an ultra-microelectrode array (UMEA)citations
- 2016Molecularly Imprinted Polymer-Carbon Nanotube based Cotinine sensorcitations
- 2009Silicon and Glass Micromachining
- 2007Integrated electrochemical sensor array for on-line monitoring of yeast fermentationscitations
- 2006Monitoring of yeast cell concentration using a micromachnined impedance sensorcitations
- 2005Monitoring of yeast cell concentration using a micromachined impedance sensor
- 20041-D nanochannels fabricated in polyimidecitations
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article
1-D nanochannels fabricated in polyimide
Abstract
A simple method using spin-deposition and sacrificial layer etching is used to fabricate all-polyimide nanochannels (100 and 500 nm channel height). Channels are characterized using spontaneous capillary filling with water, ethanol and isopropanol, and with electroosmotic flow. The channels can be produced with simple cleanroom equipment, namely spinning and metal deposition facilities. Polyimide is an excellent material for micro- and nanofluidic channels due to its favourable electrical and mechanical properties and its biocompatibility.