• Gurnani, Chitra
• Levason, William
• Huang, Ruomeng
• Wang, Yudong
• De Groot, Cornelis
• Benjamin, Sophie
• Reid, Gill
• Hector, Andrew Lee

Abstract

Arrays of individual single nanocrystals of Sb2Te3 have been formed using selective chemical vapor deposition (CVD) from a single source precursor. Crystals are self-assembled reproducibly in confined spaces of 100?nm diameter with pitch down to 500?nm. The distribution of crystallite sizes across the arrays is very narrow (standard deviation of 15%) and is affected by both the hole diameter and the array pitch. The preferred growth of the crystals in the <1 1 0> orientation along the diagonal of the square holes strongly indicates that the diffusion of adatoms results in a near thermodynamic equilibrium growth mechanism of the nuclei. A clear relationship between electrical resistivity and selectivity is established across a range of metal selenides and tellurides, showing that conductive materials result in more selective growth and suggesting that electron donation is of critical importance for selective deposition

Topics

• impedance spectroscopy
• single crystal
• resistivity
• chemical vapor deposition
• Antimony