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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Regoutz, A.
Engineering and Physical Sciences Research Council
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (28/28 displayed)
- 2023Rapid laser-induced low temperature crystallization of thermochromic VO2 sol-gel thin filmscitations
- 2022Lifetime effects and satellites in the photoelectron spectrum of tungsten metal
- 2021Lifetime effects and satellites in the photoelectron spectrum of tungsten metalcitations
- 2021Identification of hidden orbital contributions in the La_{0.65} Sr_{0.35} MnO_{3} valence band
- 2021Thermal and oxidation stability of TixW1−x diffusion barriers investigated by soft and hard x-ray photoelectron spectroscopycitations
- 2021Thermal and oxidation stability of Ti_{x}W_{1−x} diffusion barriers investigated by soft and hard x-ray photoelectron spectroscopy
- 2021Identification of hidden orbital contributions in the La$_{0.65}$Sr$_{0.35}$MnO$_3$ valence bandcitations
- 2021Identification of hidden orbital contributions in the La0.65Sr0.35MnO3 valence bandcitations
- 2020Understanding metal synergy in heterodinuclear catalysts for the copolymerization of CO₂ and epoxides
- 2020Effects of nitridation on SiC/SiO2 structures studied by hard X-ray photoelectron spectroscopy
- 2020Effects of nitridation on SiC/SiO(2)structures studied by hard X-ray photoelectron spectroscopycitations
- 2020Experimental and theoretical investigation of the chemical exfoliation of Cr-based MAX phase particles
- 2020Understanding metal synergy in heterodinuclear catalysts for the copolymerization of CO2 and epoxidescitations
- 2018A hard x-ray photoemission study of transparent conducting fluorine-doped tin dioxide
- 2018Copper (I) Selenocyanate (CuSeCN) as a Novel Hole-Transport Layer for Transistors, Organic Solar Cells, and Light-Emitting Diodes
- 2018Role of spin-orbit coupling in the electronic structure of IrO2citations
- 2018NASICON LiM2(PO4)(3) electrolyte (M = Zr) and electrode (M = Ti) materials for all solid-state Li-ion batteries with high total conductivity and low interfacial resistance
- 2018A PNA-based Lab-on-PCB diagnostic platform for rapid and high sensitivity DNA quantification.citations
- 2018Revealing spin-orbit coupling signatures in the electronic structure of IrO2citations
- 2017PdIn intermetallic nanoparticles for the hydrogenation of CO2 to methanolcitations
- 2017Quantifying the critical thickness of electron hybridization in spintronics materialscitations
- 2017Quantifying the critical thickness of electron hybridization in spintronics materialscitations
- 2016Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopycitations
- 2016Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopycitations
- 2016Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy.citations
- 2016Spatially resolved TiO x phases in switched RRAM devices using soft X-ray spectromicroscopycitations
- 2016Band gap engineering of In2O3 by alloying with Tl2O3citations
- 2016Role and optimization of the active oxide layer in TiO2-based RRAMcitations
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article
Spatially resolved TiOx phases in switched RRAM devices using soft X-ray spectromicroscopy
Abstract
Reduction in metal-oxide thin films has been suggested as the key mechanism responsible for forming conductive phases within solid-state memory devices, enabling their resistive switching capacity. The quantitative spatial identification of such conductive regions is a daunting task, particularly for metal-oxides capable of exhibiting multiple phases as in the case of TiO<sub>x</sub>. Here, we spatially resolve and chemically characterize distinct TiO<sub>x</sub> phases in localized regions of a TiO<sub>x</sub>–based memristive device by combining full-field transmission X-ray microscopy with soft X-ray spectroscopic analysis that is performed on lamella samples. We particularly show that electrically pre-switched devices in low-resistive states comprise reduced disordered phases with O/Ti ratios around 1.37 that aggregate in a ~ 100 nm highly localized region electrically conducting the top and bottom electrodes of the devices. We have also identified crystalline rutile and orthorhombic-like TiO<sub>2</sub> phases in the region adjacent to the main reduced area, suggesting that the temperature increases locally up to 1000 K, validating the role of Joule heating in resistive switching. Contrary to previous studies, our approach enables to simultaneously investigate morphological and chemical changes in a quantitative manner without incurring difficulties imposed by interpretation of electron diffraction patterns acquired via conventional electron microscopy techniques.