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Park, Soobin
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article
Capacitive humidity sensing properties of freestanding bendable porous SiO2/Si thin films
Abstract
<jats:title>Abstract</jats:title><jats:p>The fabrication of freestanding bendable films without polymer substrates is demonstrated as a capacitive humidity-sensing material. The bendable and porous SiO<jats:sub>2</jats:sub>/Si films are simply prepared by electrochemical-assisted stripping, metal-assisted chemical etching, followed by oxidation procedures. The capacitive humidity-sensing properties of the fabricated porous SiO<jats:sub>2</jats:sub>/Si film are characterized as a function of the relative humidity and frequency. The remarkable sensing performance is demonstrated in the wide RH range from 13.8 to 79.0%. The sensing behavior of the porous SiO<jats:sub>2</jats:sub>/Si film is studied by electrochemical impedance spectroscopy analysis. Additionally, the reliability of the porous SiO<jats:sub>2</jats:sub>/Si sensing material is confirmed by cyclic and long-term sensing tests.</jats:p>