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Assender, Hazel
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article
High-throughput physical vapour deposition flexible thermoelectric generators
Abstract
Flexible thermoelectric generators (TEGs) can provide uninterrupted, green energy from body-heat, overcoming bulky battery configurations that limit the wearable-technologies market today. High-throughput production of flexible TEGs is currently dominated by printing techniques, limiting material choices and performance. This work investigates the compatibility of physical vapour deposition (PVD) techniques with a flexible commercial process, roll-to-roll (R2R), for thermoelectric applications. We demonstrate, on a flexible polyimide substrate, a sputtered Bi<sub>2</sub>Te<sub>3</sub>/GeTe TEG with Seebeck coefficient (S) of 140 μV/K per pair and output power (P) of 0.4 nW per pair for a 20 °C temperature difference.For the first time, thermoelectric properties of R2R sputtered Bi<sub>2</sub>Te<sub>3</sub> films are reported and we demonstrate the ability to tune the power factor by lowering run times, lending itself to a high-speed low-cost process. To further illustrate this high-rate PVD/R2R compatibility, we fabricate a TEG using Virtual Cathode Deposition (VCD), a novel high deposition rate PVD tool, for the first time. This Bi<sub>2</sub>Te<sub>3</sub>/Bi<sub>0.5</sub>Sb<sub>1.5</sub>Te<sub>3</sub> TEG exhibits S=250 μV/K and P=0.2 nW per pair for a 20 °C temperature difference.