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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Eslava, Salvador
Imperial College London
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (23/23 displayed)
- 2024Activating 2D MoS2 by loading 2D Cu–S nanoplatelets for improved visible light photocatalytic hydrogen evolution, drug degradation, and CO2 reductioncitations
- 2024Ca‐doped PrFeO<sub>3</sub> photocathodes with enhanced photoelectrochemical activitycitations
- 2021Structural Evolution of Iron Forming Iron Oxide in a Deep Eutectic-Solvothermal Reactioncitations
- 2021Silver-Decorated TiO2 Inverse Opal Structure for Visible Light-Induced Photocatalytic Degradation of Organic Pollutants and Hydrogen Evolutioncitations
- 2020Silver-Decorated TiO2 Inverse Opal Structure for Visible Light-Induced Photocatalytic Degradation of Organic Pollutants and Hydrogen Evolutioncitations
- 2020Strategies for the deposition of LaFeO3 photocathodescitations
- 2019Graphite-protected CsPbBr3 perovskite photoanodes functionalised with water oxidation catalyst for oxygen evolution in watercitations
- 2019Enhanced Ceria Nanoflakes using Graphene Oxide as a Sacrificial Template for CO Oxidation and Dry Reforming of Methanecitations
- 2019Inexpensive Metal Free Encapsulation Layers Enable Halide Perovskite Based Photoanodes for Water Splitting
- 2019Enhanced ceria nanoflakes using graphene oxide as a sacrificial template for CO oxidation and dry reforming of methanecitations
- 2019Enhanced ceria nanoflakes using graphene oxide as a sacrificial template for CO oxidation and dry reforming of methanecitations
- 2019Strategies for the deposition of LaFeO3 photocathodes:improving the photocurrent with a polymer templatecitations
- 2018Screen printed carbon CsPbBr3 solar cells with high open-circuit photovoltagecitations
- 2018Enhanced Ceria Nanoflakes using Graphene Oxide as a Sacrificial Template for CO Oxidation and Dry Reforming of Methanecitations
- 2018Efficient hematite photoanodes prepared by hydrochloric acid-treated solutions with amphiphilic graft copolymercitations
- 2017A facile way to produce epoxy nanocomposites having excellent thermal conductivity with low contents of reduced graphene oxidecitations
- 2016Autonomous self-healing structural composites with bio-inspired designcitations
- 2015Printing in Three Dimensions with Graphenecitations
- 2013Metal-organic framework ZIF-8 films as low-κ dielectrics in microelectronicscitations
- 2008Reaction of trimethylchlorosilane in spin-on Silicalite-1 zeolite filmcitations
- 2008Nanoporous organosilicate films prepared in acidic conditions using tetraalkylammonium bromide porogenscitations
- 2007Characterization of a molecular sieve coating using ellipsometric porosimetrycitations
- 2007Profile control of novel non-Si gates using B Cl3 N2 plasmacitations
Places of action
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article
Metal-organic framework ZIF-8 films as low-κ dielectrics in microelectronics
Abstract
ZIF-8 films were deposited on silicon wafers and characterized to assess their potential as future insulators (low-κ dielectrics) in microelectronics. Scanning electron microscopy and gas adsorption monitored by spectroscopic ellipsometry confirmed the good coalescence of the crystals, the absence of intergranular voids, and the hydrophobicity of the pores. Mechanical properties were assessed by nanoindentation and tape tests, confirming sufficient rigidity for chip manufacturing processes (elastic modulus >3 GPa) and the good adhesion to the support. The dielectric constant was measured by impedance analysis at different frequencies and temperatures, indicating that κ was only 2.33 (±0.05) at 100 kHz, a result of low polarizability and density in the films. Intensity voltage curves showed that the leakage current was only 10 A cm at 1 MV cm, and the breakdown voltage was above 2 MV cm. In conclusion, metal-organic framework ZIF-8 films were experimentally found to be promising candidates as low-κ dielectrics in microelectronic chip devices. This opens a new direction for research into the application of metal-organic frameworks.