Materials Map

Discover the materials research landscape. Find experts, partners, networks.

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The Materials Map is an open tool for improving networking and interdisciplinary exchange within materials research. It enables cross-database search for cooperation and network partners and discovering of the research landscape.

The dashboard provides detailed information about the selected scientist, e.g. publications. The dashboard can be filtered and shows the relationship to co-authors in different diagrams. In addition, a link is provided to find contact information.

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The Materials Map is still under development. In its current state, it is only based on one single data source and, thus, incomplete and contains duplicates. We are working on incorporating new open data sources like ORCID to improve the quality and the timeliness of our data. We will update Materials Map as soon as possible and kindly ask for your patience.

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in Cooperation with on an Cooperation-Score of 37%

Topics

Publications (4/4 displayed)

  • 2015Pulsed Laser-Assisted Focused Electron-Beam-Induced Etching of Titanium with XeF <sub>2</sub> : Enhanced Reaction Rate and Precursor Transport11citations
  • 2008Surface characterization and functionalization of carbon nanofibers173citations
  • 2006Magnetic Alloys in Nanoscale Biomaterials2citations
  • 2004PVD synthesis and high-throughput property characterization of NiFeCr alloy libraries30citations

Places of action

Chart of shared publication
Noh, J. H.
1 / 1 shared
Fowlkes, Jason
1 / 1 shared
Lewis, B. B.
1 / 1 shared
Stanford, M. G.
1 / 1 shared
Timilsina, R.
1 / 1 shared
Melechko, A. V.
1 / 1 shared
Retterer, S. T.
1 / 1 shared
Mcknight, T. E.
1 / 1 shared
Fowlkes, J. D.
1 / 1 shared
Simpson, M. L.
1 / 1 shared
Joy, D. C.
1 / 1 shared
Leventouri, T. H.
1 / 1 shared
Sorge, Korey D.
1 / 1 shared
Melechko, Anatoli Vasilievich
1 / 1 shared
Klein, Kate L.
1 / 1 shared
Mcknight, Timothy E.
1 / 1 shared
Thompson, James R.
1 / 1 shared
Anderson, Ian M.
1 / 2 shared
Simpson, Michael L.
1 / 1 shared
Fowlkes, Jason Davidson
1 / 4 shared
George, E. P.
1 / 12 shared
Santella, M. L.
1 / 1 shared
Specht, E. D.
1 / 2 shared
Frafjord, J. J.
1 / 1 shared
Rar, A.
1 / 1 shared
Bei, H.
1 / 14 shared
Fowlkes, Jason D.
1 / 4 shared
Pharr, G. M.
1 / 7 shared
Chart of publication period
2015
2008
2006
2004

Co-Authors (by relevance)

  • Noh, J. H.
  • Fowlkes, Jason
  • Lewis, B. B.
  • Stanford, M. G.
  • Timilsina, R.
  • Melechko, A. V.
  • Retterer, S. T.
  • Mcknight, T. E.
  • Fowlkes, J. D.
  • Simpson, M. L.
  • Joy, D. C.
  • Leventouri, T. H.
  • Sorge, Korey D.
  • Melechko, Anatoli Vasilievich
  • Klein, Kate L.
  • Mcknight, Timothy E.
  • Thompson, James R.
  • Anderson, Ian M.
  • Simpson, Michael L.
  • Fowlkes, Jason Davidson
  • George, E. P.
  • Santella, M. L.
  • Specht, E. D.
  • Frafjord, J. J.
  • Rar, A.
  • Bei, H.
  • Fowlkes, Jason D.
  • Pharr, G. M.
OrganizationsLocationPeople

article

Pulsed Laser-Assisted Focused Electron-Beam-Induced Etching of Titanium with XeF <sub>2</sub> : Enhanced Reaction Rate and Precursor Transport

  • Noh, J. H.
  • Fowlkes, Jason
  • Rack, P. D.
  • Lewis, B. B.
  • Stanford, M. G.
  • Timilsina, R.
Abstract

We introduce a laser-assisted focused electron-beam-induced etching (LA-FEBIE) process which is a versatile, direct write nanofabrication method that allows nanoscale patterning and editing; we do this in order to enhance the etch rate of electron-beam-induced etching. The results demonstrate that the titanium electron stimulated etch rate via the XeF2 precursor can be enhanced up to a factor of 6 times with an intermittent pulsed laser assist. Moreover, the evolution of the etching process is correlated to in situ stage current measurements and scanning electron micrographs as a function of time. Finally, the increased etch rate is attributed to photothermally enhanced Ti–F reaction and TiF4 desorption and in some regimes enhanced XeF2 surface diffusion to the reaction zone.

Topics
  • impedance spectroscopy
  • surface
  • etching
  • titanium