Materials Map

Discover the materials research landscape. Find experts, partners, networks.

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The Materials Map is an open tool for improving networking and interdisciplinary exchange within materials research. It enables cross-database search for cooperation and network partners and discovering of the research landscape.

The dashboard provides detailed information about the selected scientist, e.g. publications. The dashboard can be filtered and shows the relationship to co-authors in different diagrams. In addition, a link is provided to find contact information.

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Materials Map under construction

The Materials Map is still under development. In its current state, it is only based on one single data source and, thus, incomplete and contains duplicates. We are working on incorporating new open data sources like ORCID to improve the quality and the timeliness of our data. We will update Materials Map as soon as possible and kindly ask for your patience.

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1.080 Topics available

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in Cooperation with on an Cooperation-Score of 37%

Topics

Publications (3/3 displayed)

  • 2017Directed Self-Assembly and Pattern Transfer of Five Nanometer Block Copolymer Lamellae112citations
  • 2016A Hybrid Chemo-/Grapho-Epitaxial Alignment Strategy for Defect Reduction in Sub-10 nm Directed Self-Assembly of Silicon-Containing Block Copolymers27citations
  • 2016Pattern Transfer of Sub-10 nm Features via Tin-Containing Block Copolymers22citations

Places of action

Chart of shared publication
Yang, Xiaomin
1 / 1 shared
Blachut, Gregory
3 / 7 shared
Asano, Yusuke
2 / 5 shared
Mallavarapu, Akhila
1 / 1 shared
Someya, Yasunobu
2 / 3 shared
Willson, C. Grant
3 / 8 shared
Maher, Michael J.
3 / 12 shared
Lane, Austin P.
3 / 4 shared
Dinhobl, Andrew M.
2 / 2 shared
Bates, Christopher M.
2 / 5 shared
Gronheid, Roel
1 / 4 shared
Durand, William J.
2 / 3 shared
Hymes, Diane
1 / 1 shared
Gurer, Emir
1 / 1 shared
Strahan, Jeffrey R.
1 / 1 shared
Carlson, Matthew C.
1 / 2 shared
Mori, Kazunori
1 / 1 shared
Chart of publication period
2017
2016

Co-Authors (by relevance)

  • Yang, Xiaomin
  • Blachut, Gregory
  • Asano, Yusuke
  • Mallavarapu, Akhila
  • Someya, Yasunobu
  • Willson, C. Grant
  • Maher, Michael J.
  • Lane, Austin P.
  • Dinhobl, Andrew M.
  • Bates, Christopher M.
  • Gronheid, Roel
  • Durand, William J.
  • Hymes, Diane
  • Gurer, Emir
  • Strahan, Jeffrey R.
  • Carlson, Matthew C.
  • Mori, Kazunori
OrganizationsLocationPeople

article

Directed Self-Assembly and Pattern Transfer of Five Nanometer Block Copolymer Lamellae

  • Yang, Xiaomin
  • Blachut, Gregory
  • Asano, Yusuke
  • Sirard, Stephen M.
  • Mallavarapu, Akhila
  • Someya, Yasunobu
  • Willson, C. Grant
  • Maher, Michael J.
  • Lane, Austin P.
Abstract

<p>The directed self-assembly (DSA) and pattern transfer of poly(5-vinyl-1,3-benzodioxole-block-pentamethyldisilylstyrene) (PVBD-b-PDSS) is reported. Lamellae-forming PVBD-b-PDSS can form well resolved 5 nm (half-pitch) features in thin films with high etch selectivity. Reactive ion etching was used to selectively remove the PVBD block, and fingerprint patterns were subsequently transferred into an underlying chromium hard mask and carbon layer. DSA of the block copolymer (BCP) features resulted from orienting PVBD-b-PDSS on guidelines patterned by nanoimprint lithography. A density multiplication factor of 4× was achieved through a hybrid chemo-/grapho-epitaxy process. Cross-sectional scanning tunneling electron microscopy/electron energy loss spectroscopy (STEM/EELS) was used to analyze the BCP profile in the DSA samples. Wetting layers of parallel orientation were observed to form unless the bottom and top surface were neutralized with a surface treatment and top coat, respectively.</p>

Topics
  • density
  • impedance spectroscopy
  • surface
  • Carbon
  • chromium
  • thin film
  • forming
  • electron microscopy
  • copolymer
  • block copolymer
  • self-assembly
  • lithography
  • electron energy loss spectroscopy
  • lamellae
  • plasma etching