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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Petrov, R. H. | Madrid |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Ali, M. A. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Huth, Michael
European Commission
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (19/19 displayed)
- 2024Nanoscale, surface-confined phase separation by electron beam induced oxidationcitations
- 2024Gas-Phase Synthesis of Iron Silicide Nanostructures Using a Single-Source Precursorcitations
- 2023Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model Systemcitations
- 2022Vanadium and Manganese Carbonyls as Precursors in Electron-Induced and Thermal Deposition Processes
- 2022Direct-Write 3D Nanoprinting of High-Resolution Magnetic Force Microscopy Nanoprobes
- 2022Precursors for Direct-Write Nanofabrication with Electrons
- 2022Highly-packed proximity-coupled DC Josephson junction arrays by a direct-write approachcitations
- 2022Focused Ion Beam vs Focused Electron Beam Deposition of Cobalt Silicide Nanostructures Using Single-Source Precursorscitations
- 2021AC conductivity and correlation effects in nano-granular Pt/Ccitations
- 2021Engineered Magnetization and Exchange Stiffness in Direct-Write Co-Fe Nanoelementscitations
- 2018Preparation of polymer/clay hybrid encapsulation for barrier applications controlled by Hansen Solubility Parameters
- 2014Charge transfer tuning by chemical substitution and uniaxial pressure in the organic complex tetramethoxypyrene–tetracyanoquinodimethanecitations
- 2014Magnetization reversal assisted by half antivortex states in nanostructured circular cobalt diskscitations
- 2013Variable tunneling barriers in FEBID based PtC metal-matrix nanocomposites as a transducing element for humidity sensingcitations
- 2012Spontaneous dissociation of Co 2 (CO) 8 and autocatalytic growth of Co on SiO 2: a combined experimental and theoretical investigationcitations
- 2012Focused electron beam induced deposition: a perspectivecitations
- 2012Electrical transport and pinning properties of Nb thin films patterned with focused ion beam-milled washboard nanostructurescitations
- 2012Spontaneous dissociation of Co₂(CO)₈ and autocatalytic growth of Co on SiO₂: A combined experimental and theoretical investigationcitations
- 2010A tunable strain sensor using nanogranular metalscitations
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article
Focused Ion Beam vs Focused Electron Beam Deposition of Cobalt Silicide Nanostructures Using Single-Source Precursors
Abstract
<p>Direct-write techniques for the fabrication of nanostructures are of specific interest due to their ability for a maskless fabrication of any arbitrary three-dimensional shape. To date, there is a very limited number of reports describing differences in the focused ion and electron beam induced deposition (FIBID/FEBID) for the same precursor species. This report contributes to filling this gap by testing two single-source precursors for the deposition of cobalt silicide in Ga-ion beam writing and reveals H<sub>2</sub>Si(Co(CO)<sub>4</sub>)<sub>2</sub>to be a very suitable precursor for the technique retaining the 2:1 ratio of Co:Si in the deposit. Maximum metal/metalloid contents of up to 90 atom % are obtained in FIBID deposits, while FEBID with the same precursor provides material containing <60 atom % total metal/metalloid content. A dense deposit is obtained by using FEBID showing paramagnetic behavior and electric properties of a granular metal. In contrast, the FIBID material is porous and the expected ferromagnetic and temperature-dependent electric properties for dicobalt silicide have been observed. Further analysis enabled the proposition of different dominating material conversion channels based on the observed microstructural features including bubble formation in FIBID-derived material. The differences in materials properties depending on the deposition strategy can influence the cobalt silicide deposits' applicability in nanoelectronics and spintronics.</p>