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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Plank, Harald
Graz University of Technology
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (27/27 displayed)
- 2024Nanoscale, surface-confined phase separation by electron beam induced oxidationcitations
- 2024A Review on Direct-Write Nanoprinting of Functional 3D Structures with Focused Electron Beamscitations
- 2023Thermally-triggered multi-shape-memory behavior of binary blends of cross-linked EPDM with various thermoplastic polyethylenes and their potential applications as temperature indicatorscitations
- 2023Spectral Tuning of Plasmonic Activity in 3D Nanostructures via High-Precision Nano-Printingcitations
- 2023Pillar Growth by Focused Electron Beam-Induced Deposition Using a Bimetallic Precursor as Model Systemcitations
- 2022Vanadium and Manganese Carbonyls as Precursors in Electron-Induced and Thermal Deposition Processes
- 2022A study on the correlation between micro and magnetic domain structure of Cu52Ni34Fe14 spinodal alloyscitations
- 2022Direct-Write 3D Nanoprinting of High-Resolution Magnetic Force Microscopy Nanoprobes
- 2022Precursors for Direct-Write Nanofabrication with Electrons
- 2022Localized Direct Material Removal and Deposition by Nanoscale Field Emission Scanning Probescitations
- 2022Focused Ion Beam vs Focused Electron Beam Deposition of Cobalt Silicide Nanostructures Using Single-Source Precursorscitations
- 2020Cellulose metal sulfide based nanocomposite thin films
- 2019Focused Electron Beam Induced Deposition Synthesis of 3D Photonic and Magnetic Nanoresonatorscitations
- 2019In situ real-time annealing of ultrathin vertical Fe nanowires grown by focused electron beam induced depositioncitations
- 2019Multi-layered nanoscale cellulose/CuInS2 sandwich type thin filmscitations
- 2019Analyzing the Nanogranularity of Focused-Electron-Beam-Induced-Deposited Materials by Electron Tomographycitations
- 2018Thin Films from Acetylated Lignin
- 2017How Bound and Free Fatty Acids in Cellulose Films Impact Nonspecific Protein Adsorptioncitations
- 2017How Bound and Free Fatty Acids in Cellulose Films Impact Nonspecific Protein Adsorptioncitations
- 2016Enzymes as Biodevelopers for Nano- And Micropatterned Bicomponent Biopolymer Thin Films.citations
- 2014The nanoscale implications of a molecular gas beam during electron beam induced depositioncitations
- 2014Purification of Nanoscale Electron-Beam-Induced Platinum Deposits via a Pulsed Laser-Induced Oxidation Reactioncitations
- 2014A combined approach to predict spatial temperature evolution and its consequences during FIB processing of soft mattercitations
- 2013Chemical degradation and morphological instabilities during focused ion beam prototyping of polymerscitations
- 2013Variable tunneling barriers in FEBID based PtC metal-matrix nanocomposites as a transducing element for humidity sensingcitations
- 2012Direct electroplating of copper on tantalum from ionic liquids in high vacuum: Origin of the tantalum oxide layercitations
- 2012Direct-on-barrier copper electroplating on ruthenium from the ionic liquid 1-ethyl-3-methylimidazolium dicyanamidecitations
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article
Focused Ion Beam vs Focused Electron Beam Deposition of Cobalt Silicide Nanostructures Using Single-Source Precursors
Abstract
<p>Direct-write techniques for the fabrication of nanostructures are of specific interest due to their ability for a maskless fabrication of any arbitrary three-dimensional shape. To date, there is a very limited number of reports describing differences in the focused ion and electron beam induced deposition (FIBID/FEBID) for the same precursor species. This report contributes to filling this gap by testing two single-source precursors for the deposition of cobalt silicide in Ga-ion beam writing and reveals H<sub>2</sub>Si(Co(CO)<sub>4</sub>)<sub>2</sub>to be a very suitable precursor for the technique retaining the 2:1 ratio of Co:Si in the deposit. Maximum metal/metalloid contents of up to 90 atom % are obtained in FIBID deposits, while FEBID with the same precursor provides material containing <60 atom % total metal/metalloid content. A dense deposit is obtained by using FEBID showing paramagnetic behavior and electric properties of a granular metal. In contrast, the FIBID material is porous and the expected ferromagnetic and temperature-dependent electric properties for dicobalt silicide have been observed. Further analysis enabled the proposition of different dominating material conversion channels based on the observed microstructural features including bubble formation in FIBID-derived material. The differences in materials properties depending on the deposition strategy can influence the cobalt silicide deposits' applicability in nanoelectronics and spintronics.</p>