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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Seo, Sehun
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (4/4 displayed)
- 2021Growth of Transition Metal Dichalcogenide Heterojunctions with Metal Oxides for Metal–Insulator–Semiconductor Capacitorscitations
- 2019Direct In Situ Growth of Centimeter-Scale Multi-Heterojunction MoS 2 /WS 2 /WSe 2 Thin-Film Catalyst for Photo-Electrochemical Hydrogen Evolutioncitations
- 2017High critical current density over 1MAcm(-2) at 13T in BaZrO3 incorporated Ba(Fe,Co)(2)As-2 thin filmcitations
- 2016Thermally activated flux flow in superconducting epitaxial FeSe0.6Te0.4 thin filmcitations
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article
Growth of Transition Metal Dichalcogenide Heterojunctions with Metal Oxides for Metal–Insulator–Semiconductor Capacitors
Abstract
The coupling of transition metal dichalcogenides (TMDs) and other materials offers significant synergistic effects; however, the fabrication of artificial multiheterojunction (MHJ) TMDs is a significant challenge owing to complex processes, including layer-by-layer stacking and transfer of free-standing oxide layers. Herein, we developed a straightforward method using sequential pulsed laser deposition (PLD) to fabricate MHJ-TMD thin films. The artificially designed TMD-based (WSe2/MoS2) superlattice and TMD/oxide-based MHJ thin films were successfully synthesized on the centimeter-scale silicon-based substrate via an in situ PLD process. The PLD-grown MHJ-TMD films exhibited good uniformity, layer-by-layer stacking, and interlayer coupling between each TMD layer. Also, we fabricated MHJ-TMD films as a metal-semiconductor/insulator-metal device to confirm their potential as an electronic device. We believe that our technique will widen the scope of TMD applications in different fields. © 2021 American Chemical Society.