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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Li, Tao
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (18/18 displayed)
- 2023Structural, optical, and thermal properties of BN thin films grown on diamond via pulsed laser depositioncitations
- 2023Structural, optical, and thermal properties of BN thin films grown on diamond via pulsed laser deposition
- 2022A Carboranyl Electrolyte Enabling Highly Reversible Sodium Metal Anodes via a “Fluorine‐Free” SEIcitations
- 2020Investigation of flame retarded polypropylene by high-speed planar laser-induced fluorescence of OH radicals combined with a thermal decomposition analysiscitations
- 2020Spacer-defined intrinsic multiple patterningcitations
- 2018Structure-function correlative microscopy of peritubular and intertubular dentinecitations
- 2018Transition to Superwetting for a Nanostructured Surface
- 2018Transition to Superwetting for a Nanostructured Surface
- 2018Modeling salinity effect on rice growth and rice yield with ORYZA v3 and APSIM-Oryzacitations
- 2018Mapping the transition to superwetting state for nanotextured surfaces templated from block-copolymer self-assemblycitations
- 2018Mapping the transition to superwetting state for nanotextured surfaces templated from block-copolymer self-assemblycitations
- 2018Mapping the transition to superwetting state for nanotextured surfaces templated from block-copolymer self-assemblycitations
- 2016Understanding nature’s residual strain engineering at the human dentine-enamel junction interfacecitations
- 2016Wafer-Scale Nanopillars Derived from Block Copolymer Lithography for Surface-Enhanced Raman Spectroscopycitations
- 2016Effects of coating spherical iron oxide nanoparticlescitations
- 2015Fast & scalable pattern transfer via block copolymer nanolithographycitations
- 2015Nanoporous gyroid TiO2 and SnO2 by melt infiltration of block copolymer templatescitations
- 2015Nanoporous gyroid TiO 2 and SnO 2 by melt infiltration of block copolymer templatescitations
Places of action
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article
Wafer-Scale Nanopillars Derived from Block Copolymer Lithography for Surface-Enhanced Raman Spectroscopy
Abstract
We report a novel nanofabrication process via block copolymer lithography using solvent vapor annealing. The nanolithography process is facile and scalable, enabling fabrication of highly ordered periodic patterns over entire wafers as substrates for surface-enhanced Raman spectroscopy (SERS). Direct silicon etching with high aspect ratio templated by the block copolymer mask is realized without any intermediate layer or external precursors. Uniquely, an atomic layer deposition (ALD)-assisted method is introduced to allow reversing of the morphology relative to the initial pattern. As a result, highly ordered silicon nanopillar arrays are fabricated with controlled aspect ratios. After metallization, the resulting nanopillar arrays are suitable for SERS applications. These structures readily exhibit an average SERS enhancement factor of above 10<sup>8</sup>, SERS uniformities of 8.5% relative standard deviation across 4 cm, and 6.5% relative standard deviation over 5 × 5 mm<sup>2</sup> surface area, as well as a very low SERS background. The as-prepared SERS substrate, with a good enhancement and large-area uniformity, is promising for practical SERS sensing applications.