| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Philip, Anish
Aalto University
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (10/10 displayed)
- 2024Block Copolymer Approach toward Selective Atomic-Layer Deposition of ZnO Films
- 2024Conformal High-Aspect-Ratio Solid Electrolyte Thin Films for Li-Ion Batteries by Atomic Layer Depositioncitations
- 2024Chemical Bonding and Crystal Structure Schemes in Atomic/Molecular Layer Deposited Fe-Terephthalate Thin Filmscitations
- 2023Block Copolymer Approach toward Selective Atomic-Layer Deposition of ZnO Films
- 2023High-Quality Magnetically Hard ε-Fe2O3 Thin Films through Atomic Layer Deposition for Room-Temperature Applicationscitations
- 2022Atomic Layer Deposition of Intermetallic Fe4Zn9 Thin Films from Diethyl Zinccitations
- 2022High‐Quality Magnetically Hard ε‐Fe 2 O 3 Thin Films through Atomic Layer Deposition for Room‐Temperature Applicationscitations
- 2021Mechanics of nanoscale ϵ-Fe 2 O 3 /organic superlattices toward flexible thin-film magnetscitations
- 2021Photoactive thin-film structures of curcumin, TiO2 and ZnOcitations
- 2020Modulating the Structure and Magnetic Properties of ϵ-Fe2O3 Nanoparticles via Electrochemical Li+ Insertioncitations
Places of action
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article
Conformal High-Aspect-Ratio Solid Electrolyte Thin Films for Li-Ion Batteries by Atomic Layer Deposition
Abstract
Lithium phosphorus oxynitride (LiPON) is a state-of-the-art solid electrolyte material for thin-film microbatteries. These applications require conformal thin films on challenging 3D surface structures, and among the advanced thin-film deposition techniques, atomic layer deposition (ALD) is believed to stand out in terms of producing appreciably conformal thin films. Here we quantify the conformality (i.e., the evenness of deposition) of thin ALD-grown LiPON films using lateral high-aspect-ratio test structures. Two different lithium precursors, lithium <i>tert</i>-butoxide (LiO<sup>t</sup>Bu) and lithium bis(trimethylsilyl)amide (Li-HMDS), were investigated in combination with diethyl phosphoramidate as the source of oxygen, phosphorus, and nitrogen. The results indicate that the film growth proceeded significantly deeper into the 3D cavities for the films grown from LiO<sup>t</sup>Bu, while the Li-HMDS-based films grew more evenly initially, right after the cavity entrances. These observations can be explained by differences in the precursor diffusion and reactivity. The results open possibilities for the use of LiPON as a solid electrolyte in batteries with high-surface-area electrodes. This could enable faster charging and discharging as well as the use of thin-film technology in fabricating thin-film electrodes of meaningful charge capacity.