| People | Locations | Statistics |
|---|---|---|
| Naji, M. |
| |
| Motta, Antonella |
| |
| Aletan, Dirar |
| |
| Mohamed, Tarek |
| |
| Ertürk, Emre |
| |
| Taccardi, Nicola |
| |
| Kononenko, Denys |
| |
| Petrov, R. H. | Madrid |
|
| Alshaaer, Mazen | Brussels |
|
| Bih, L. |
| |
| Casati, R. |
| |
| Muller, Hermance |
| |
| Kočí, Jan | Prague |
|
| Šuljagić, Marija |
| |
| Kalteremidou, Kalliopi-Artemi | Brussels |
|
| Azam, Siraj |
| |
| Ospanova, Alyiya |
| |
| Blanpain, Bart |
| |
| Ali, M. A. |
| |
| Popa, V. |
| |
| Rančić, M. |
| |
| Ollier, Nadège |
| |
| Azevedo, Nuno Monteiro |
| |
| Landes, Michael |
| |
| Rignanese, Gian-Marco |
|
Pletincx, Sven
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (12/12 displayed)
- 2022Passive Film Properties of Martensitic Steels in Alkaline Environment: Influence of the Prior Austenite Grain Sizecitations
- 2020Integrated cleanroom process for the vapor-phase deposition of large-area zeolitic imidazolate framework thin filmscitations
- 2019Growth mechanism of novelty scaly CNFs@ZnO nanofibers structure and its photoluminescence property
- 2019Dual Role of Lithium on the Structure and Self-Healing Ability of PMMA-Silica Coatings on AA7075 Alloycitations
- 2019Integrated Cleanroom Process for the Vapor-Phase Deposition of Large-Area Zeolitic Imidazolate Framework Thin Filmscitations
- 2019An integrated cleanroom process for the vapor-phase deposition of large-area zeolitic imidazolate framework thin filmscitations
- 2019An in situ spectro-electrochemical monitoring of aqueous effects on polymer/metal oxide interfacescitations
- 2018Advanced (In Situ) Surface Analysis of Organic Coating/Metal Oxide Interactions for Corrosion Protection of Passivated Metalscitations
- 2018In situ methanol adsorption on aluminum oxide monitored by a combined ORP-EIS and ATR-FTIR Kretschmann setupcitations
- 2017In Situ Characterization of the Initial Effect of Water on Molecular Interactions at the Interface of Organic/Inorganic Hybrid Systemscitations
- 2017Unravelling the chemical influence of water on the PMMA/aluminum oxide hybrid interface in situcitations
- 2015Probing the interface between ultrathin polymeric films and Aluminum oxide: in-situ investigation of the electrolyte diffusion throughout the coating
Places of action
| Organizations | Location | People |
|---|
article
Integrated Cleanroom Process for the Vapor-Phase Deposition of Large-Area Zeolitic Imidazolate Framework Thin Films
Abstract
Robust and scalable thin-film deposition<br/>methods are key to realize the potential of metal-organic<br/>frameworks (MOFs) in electronic devices. Here, we report<br/>the first integration of the chemical vapor deposition (CVD)<br/>of MOF coatings in a custom reactor within a cleanroom<br/>setting. As a test case, the MOF-CVD conditions for<br/>the zeolitic imidazolate framework-8 are optimized to enable<br/>smooth, pinhole-free, and uniform thin films on full 200 mm<br/>wafers under mild conditions. The single-chamber MOF-CVD<br/>process and the impact of the deposition parameters are<br/>elucidated via a combination of in situ monitoring and ex situ<br/>characterization. The resulting process guidelines will pave the<br/>way for new MOF-CVD formulations and a plethora of MOF based devices.