693.932 PEOPLE
| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Ameloot, Rob
KU Leuven
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (28/28 displayed)
- 2024Chemical Vapor Deposition and High-Resolution Patterning of a Highly Conductive Two-Dimensional Coordination Polymer Filmcitations
- 2024Polymorphism and orientation control of copper-dicarboxylate metal-organic framework thin films through vapour- and liquid-phase growthcitations
- 2024Polymorphism and orientation control of copper-dicarboxylate metal-organic framework thin films through vapour- and liquid-phase growthcitations
- 2024Molecular Layer Deposition of Zeolitic Imidazolate Framework-8 Filmscitations
- 2024Chemical Bonding and Crystal Structure Schemes in Atomic/Molecular Layer Deposited Fe-Terephthalate Thin Filmscitations
- 2023Chemical Vapor Deposition and High-Resolution Patterning of a Highly Conductive Two-Dimensional Coordination Polymer Filmcitations
- 2023Vapor-assisted synthesis of the MOF-74 metal–organic framework family from zinc, cobalt, and magnesium oxidescitations
- 2023Molecular Layer Deposition of Zeolitic Imidazolate Framework-8 Filmscitations
- 2023Molecular Layer Deposition of Zeolitic Imidazolate Framework-8 Filmscitations
- 2023Molecular Layer Deposition of Zeolitic Imidazolate Framework-8 Filmscitations
- 2023Identifying the Internal Network Structure of a New Copper Isonicotinate Thin-Film Polymorph Obtained via Chemical Vapor Depositioncitations
- 2023Conformal Electrodeposition of Mesoporous Silica over High Aspect Ratio (AR>100) Nanomesh Electrodes
- 2022How reproducible are surface areas calculated from the BET equation?citations
- 2022How reproducible are surface areas calculated from the BET equation?citations
- 2022Unraveling the mechanism of the conversion treatment on Advanced High Strength Stainless Steels (AHSSS)citations
- 2022How Reproducible are Surface Areas Calculated from the BET Equation?citations
- 2022How Reproducible are Surface Areas Calculated from the BET Equation?citations
- 2022How Reproducible are Surface Areas Calculated from the BET Equation?citations
- 2021Porosimetry for Thin Films of Metal–Organic Frameworkscitations
- 2021How Reproducible Are Surface Areas Calculated from the BET Equation?citations
- 2020Templated Solvent-Free Powder Synthesis and MOF-CVD Films of the Ultramicroporous Metal-Organic Framework alpha-Magnesium Formatecitations
- 2020Solvent-Free Powder Synthesis and Thin Film Chemical Vapor Deposition of a Zinc Bipyridyl-Triazolate Frameworkcitations
- 2020Integrated cleanroom process for the vapor-phase deposition of large-area zeolitic imidazolate framework thin filmscitations
- 2020Solvent-Free Powder Synthesis and MOF-CVD Thin Films of the Large-Pore Metal-Organic Framework MAF-6citations
- 2019Integrated Cleanroom Process for the Vapor-Phase Deposition of Large-Area Zeolitic Imidazolate Framework Thin Filmscitations
- 2019An integrated cleanroom process for the vapor-phase deposition of large-area zeolitic imidazolate framework thin filmscitations
- 2017Gel-based morphological design of zirconium metal-organic frameworkscitations
- 2017Gel-Based Morphological Design of Zirconium Metal-organic Frameworkscitations
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article
Integrated Cleanroom Process for the Vapor-Phase Deposition of Large-Area Zeolitic Imidazolate Framework Thin Films
Abstract
Robust and scalable thin-film deposition<br/>methods are key to realize the potential of metal-organic<br/>frameworks (MOFs) in electronic devices. Here, we report<br/>the first integration of the chemical vapor deposition (CVD)<br/>of MOF coatings in a custom reactor within a cleanroom<br/>setting. As a test case, the MOF-CVD conditions for<br/>the zeolitic imidazolate framework-8 are optimized to enable<br/>smooth, pinhole-free, and uniform thin films on full 200 mm<br/>wafers under mild conditions. The single-chamber MOF-CVD<br/>process and the impact of the deposition parameters are<br/>elucidated via a combination of in situ monitoring and ex situ<br/>characterization. The resulting process guidelines will pave the<br/>way for new MOF-CVD formulations and a plethora of MOF based devices.