| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Feyter, Steven De
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Topics
Publications (13/13 displayed)
- 2024Reversible Redox‐Driven Crystallization in a Paracyclophane Monolayer at a Solid–Liquid Interfacecitations
- 2024Upscaled Synthesis Protocol for Phase-Pure, Colloidally Stable MXenes with Long Shelf Livescitations
- 2024Single-Layered Imine-Linked Porphyrin-Based Two-Dimensional Covalent Organic Frameworks Targeting CO<sub>2</sub> Reductioncitations
- 2023Molecular Layer Deposition of Zeolitic Imidazolate Framework-8 Filmscitations
- 2023Curved graphene nanoribbons derived from tetrahydropyrene-based polyphenylenes via one-pot K-region oxidation and Scholl cyclizationcitations
- 2022An embedded interfacial network stabilizes inorganic CsPbI3 perovskite thin filmscitations
- 2021Two-dimensional perovskites with alternating cations in the interlayer space for stable light-emitting diodescitations
- 2019Integrated Cleanroom Process for the Vapor-Phase Deposition of Large-Area Zeolitic Imidazolate Framework Thin Filmscitations
- 2018Hydrogen-bonded siloxane liquid crystals for hybrid nanomaterials
- 2016Liquid nickel salts: synthesis, crystal structure determination and electrochemical synthesis of nickel nanoparticles
- 2014Layer-by-Layer synthesis and tunable optical properties of hybrid magnetic-plasmonic nanocomposites using short bifunctional molecular linkerscitations
- 2006Chiral alignment of OPV chromophores: explitation of the ureidophtalimide based foldamer
- 2003Morphology of protein polymer hybrid films studied by AFM and scanning confocal fluorescence microscopy
Places of action
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article
Integrated Cleanroom Process for the Vapor-Phase Deposition of Large-Area Zeolitic Imidazolate Framework Thin Films
Abstract
Robust and scalable thin-film deposition<br/>methods are key to realize the potential of metal-organic<br/>frameworks (MOFs) in electronic devices. Here, we report<br/>the first integration of the chemical vapor deposition (CVD)<br/>of MOF coatings in a custom reactor within a cleanroom<br/>setting. As a test case, the MOF-CVD conditions for<br/>the zeolitic imidazolate framework-8 are optimized to enable<br/>smooth, pinhole-free, and uniform thin films on full 200 mm<br/>wafers under mild conditions. The single-chamber MOF-CVD<br/>process and the impact of the deposition parameters are<br/>elucidated via a combination of in situ monitoring and ex situ<br/>characterization. The resulting process guidelines will pave the<br/>way for new MOF-CVD formulations and a plethora of MOF based devices.