• Tietze, Max L.
• Marcoen, Kristof
• Imaz, Inhar
• Rubio-Gimenez, Victor
• Kravchenko, Dmitry E.
• Arnauts, Giel
• Korytov, Maxim
• Wauteraerts, Nathalie
• Feyter, Steven De
• Ameloot, Rob
• Matavž, Aleksander
• Maspoch, Daniel
• Tu, Min
• Vereecken, Philippe
• Cruz, Alexander John
• Hauffman, Tom
• Smets, Jorid

Abstract

<p>Vapor-phase film deposition of metal-organic frameworks (MOFs) would facilitate the integration of these materials into electronic devices. We studied the vapor-phase layer-by-layer deposition of zeolitic imidazolate framework 8 (ZIF-8) by consecutive, self-saturating reactions of diethyl zinc, water, and 2-methylimidazole on a substrate. Two approaches were compared: (1) Direct ZIF-8 “molecular layer deposition” (MLD), which enables a nanometer-resolution thickness control and employs only self-saturating reactions, resulting in smooth films that are crystalline as-deposited, and (2) two-step ZIF-8 MLD, in which crystallization occurs during a postdeposition treatment with additional linker vapor. The latter approach resulted in a reduced deposition time and an improved MOF quality, i.e., increased crystallinity and probe molecule uptake, although the smoothness and thickness control were partially lost. Both approaches were developed in a modified atomic layer deposition reactor to ensure cleanroom compatibility.</p>

Topics

• phase
• zinc
• crystallization
• crystallinity
• atomic layer deposition