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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Zhang, Chao
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (17/17 displayed)
- 2024Ion Transport in Polymer Electrolytes : Building New Bridges between Experiment and Molecular Simulationcitations
- 2024Flexural behavior and microstructural material properties of sandwich foam core under arctic temperature conditionscitations
- 2024Salt Effects on the Mechanical Properties of Ionic Conductive Polymer : A Molecular Dynamics Studycitations
- 2022Self-Aligned Thin-Film Patterning by Area-Selective Etching of Polymers
- 2022Substrate-Dependent Area-Selective Atomic Layer Deposition of Noble Metals from Metal beta-Diketonate Precursorscitations
- 2021Self-Aligned Thin-Film Patterning by Area-Selective Etching of Polymerscitations
- 2021Self-Aligned Thin-Film Patterning by Area-Selective Etching of Polymerscitations
- 2020Effects of Solvent Polarity on Li-ion Diffusion in Polymer Electrolytes : An All-Atom Molecular Dynamics Study with Charge Scalingcitations
- 2018Electron microprobe technique for the determination of iron oxidation state in silicate glassescitations
- 2017Non-contact measurement of thermal field at high temperature using a single silicon based sensor camera
- 2017Molecularly imprinted electropolymerization on a metal-coated optical fiber for gas sensing applicationscitations
- 2015Towards efficient flight: insights on proper morphing-wing modulation in a bat-like robotcitations
- 2014Functionalized macroporous silicon chemiresistor for the miniaturization of hydrogen sensors
- 2014Palladium nanoparticles deposition via precipitation: a new method to functionalize macroporous siliconcitations
- 2013Sensing mechanism of hydrogen sensors based on palladium-loaded tungsten oxide (Pd-WO3)citations
- 2013Sensitive and rapid hydrogen sensors based on Pd-WO3 thick films with different morphologiescitations
- 2012Sensing mechanism of hydrogen sensors based on palladium-loaded tungsten oxide (Pd-WO3)citations
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article
Substrate-Dependent Area-Selective Atomic Layer Deposition of Noble Metals from Metal beta-Diketonate Precursors
Abstract
<p>Area-selective ALD of Ir, Ru, and Rh with excellent substrate selectivity was achieved by using metal beta-diketonates, i.e., Ir(acac)(3), Ru(thd)(3), and Rh(acac)(3), as precursors with either O-2 or air as a coreactant. Native SiO2 and Ru were identified as growth surfaces while low-k SiOC, native oxide terminated Cu and Co, Al2O3, ZrO2, and HfO2 were identified as the nongrowth surfaces. UV (254 nm) irradiation in air was proven efficient to activate the low-k SiOC surface for the noble metal growth. UV exposure of 1 min was sufficient for the growth activation yet without causing any damage to the low-k material. Selective growth of the noble metals was successfully demonstrated on a UV-irradiated test chip that has micro-and nanometer-scale low-k SiOC/Cu patterns. At the optimal selective deposition temperatures, that is 225 & DEG;C for the Ir, 300 & DEG;C for the Ru, and 250 & DEG;C for the Rh, films with a thickness of at least 10 nm for Ir and & SIM;30 nm for Ru and Rh can be selectively deposited on the UV-activated low-k SiOC regions, while no growth occurs on Cu regions, as characterized by SEM, TEM, and EDS.</p>