| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Solano Minuesa, Eduardo
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (13/13 displayed)
- 2024Solution-processed Pb(Zr,Ti)O3 thin films with strong remnant Pockels coefficientcitations
- 2023Plasma-enhanced atomic layer deposition of crystalline Ga2S3 thin filmscitations
- 2023Plasma-enhanced atomic layer deposition of crystalline Ga2S3 thin filmscitations
- 2022Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Propertiescitations
- 2022Shuffling atomic layer deposition gas sequences to modulate bimetallic thin films and nanoparticle propertiescitations
- 2022Temperature-induced polymorphism of a benzothiophene derivative: reversibility and impact on the thin film morphologycitations
- 2022An embedded interfacial network stabilizes inorganic CsPbI3 perovskite thin filmscitations
- 2020Self-assembly of block copolymers under non-isothermal annealing conditions as revealed by grazing-incidence small-angle X-ray scatteringcitations
- 2019Poly(Cyclohexene Phthalate) Nanoparticles for Controlled Dasatinib Delivery in Breast Cancer Therapycitations
- 2019Thermal unequilibrium of strained black CsPbI3 thin filmscitations
- 2018ALD-developed plasmonic two-dimensional Au-WO3-TiO2 heterojunction architectonics for design of photovoltaic devicescitations
- 2017Size- and composition-controlled Pt–Sn bimetallic nanoparticles prepared by atomic layer depositioncitations
- 2016Atomic layer deposition route to tailor nanoalloys of noble and non-noble metalscitations
Places of action
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article
Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
Abstract
Atomic layer deposition (ALD) typically employs metal precursor and co-reactant pulses to deposit thin films in a layer-by-layer fashion. While conventional ABAB-type ALD sequences implement only two functionalities, namely a metal source and ligand exchange agent, additional functionalities have emerged, including etching and reduction agents. Herein, we construct gas phase sequences – coined as ALD+ – with complexities reaching beyond classic ABAB-type ALD by freely combining multiple functionalities within irregular pulse schemes, e.g. ABCADC. The possibilities of such combinations are explored as a smart strategy to tailor bimetallic thin film and nanoparticle (NP) properties. By doing so, we demonstrate that bimetallic thin films can be tailored with target thickness and through the full compositional range, whilst the morphology can be flexibly modulated from thin films to NPs by shuffling the pulse sequence. These complex pulse schemes are expected to be broadely applicable, but are here explored for Pd-Ru bimetallic thin films and NPs.