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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Li, Chen
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (10/10 displayed)
- 2022Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Propertiescitations
- 2022Shuffling atomic layer deposition gas sequences to modulate bimetallic thin films and nanoparticle propertiescitations
- 2021Grain boundaries as a diffusion-limiting factor in lithium-rich NMC cathodes for high-energy lithium-ion batteriescitations
- 2020Near-Edge Ligand Stripping and Robust Radiative Exciton Recombination in CdSe/CdS Core/Crown Nanoplateletscitations
- 2020Developing Lattice Matched ZnMgSe Shells on InZnP Quantum Dots for Phosphor Applicationscitations
- 2020Developing Lattice Matched ZnMgSe Shells on InZnP Quantum Dots for Phosphor Applicationscitations
- 2020Near-edge ligand stripping and robust radiative exciton recombination in CdSe/CdS core/crown nanoplateletscitations
- 2016nitial Cumulative Effects in Femtosecond Pulsed Laser-induced Periodic Surface Structures on Bulk Metallic Glassescitations
- 2016Scattering effects and high-spatial-frequencynanostructures on ultrafast laser irradiatedsurfaces of zirconium metallic alloys with nanoscaledtopographiescitations
- 2014A study of photothermal laser ablation of various polymers on microsecond time scalescitations
Places of action
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article
Shuffling Atomic Layer Deposition Gas Sequences to Modulate Bimetallic Thin Films and Nanoparticle Properties
Abstract
Atomic layer deposition (ALD) typically employs metal precursor and co-reactant pulses to deposit thin films in a layer-by-layer fashion. While conventional ABAB-type ALD sequences implement only two functionalities, namely a metal source and ligand exchange agent, additional functionalities have emerged, including etching and reduction agents. Herein, we construct gas phase sequences – coined as ALD+ – with complexities reaching beyond classic ABAB-type ALD by freely combining multiple functionalities within irregular pulse schemes, e.g. ABCADC. The possibilities of such combinations are explored as a smart strategy to tailor bimetallic thin film and nanoparticle (NP) properties. By doing so, we demonstrate that bimetallic thin films can be tailored with target thickness and through the full compositional range, whilst the morphology can be flexibly modulated from thin films to NPs by shuffling the pulse sequence. These complex pulse schemes are expected to be broadely applicable, but are here explored for Pd-Ru bimetallic thin films and NPs.