| People | Locations | Statistics |
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| Naji, M. |
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| Motta, Antonella |
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| Aletan, Dirar |
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| Mohamed, Tarek |
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| Ertürk, Emre |
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| Taccardi, Nicola |
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| Kononenko, Denys |
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| Petrov, R. H. | Madrid |
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| Alshaaer, Mazen | Brussels |
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| Bih, L. |
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| Casati, R. |
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| Muller, Hermance |
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| Kočí, Jan | Prague |
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| Šuljagić, Marija |
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| Kalteremidou, Kalliopi-Artemi | Brussels |
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| Azam, Siraj |
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| Ospanova, Alyiya |
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| Blanpain, Bart |
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| Ali, M. A. |
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| Popa, V. |
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| Rančić, M. |
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| Ollier, Nadège |
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| Azevedo, Nuno Monteiro |
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| Landes, Michael |
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| Rignanese, Gian-Marco |
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Vahl, Alexander
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (14/14 displayed)
- 2024ITO-TiO2 Heterojunctions on Glass Substrates for Photocatalytic Gold Growth Along Pattern Edges
- 2024Early-stage silver growth during sputter deposition on SiO2 and polystyrene - Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMScitations
- 2024Early-stage silver growth during sputter deposition on SiO$_2$ and polystyrene – Comparison of biased DC magnetron sputtering, high-power impulse magnetron sputtering (HiPIMS) and bipolar HiPIMScitations
- 2024Co‐sputtering of A Thin Film Broadband Absorber Based on Self‐Organized Plasmonic Cu Nanoparticlescitations
- 2023Co‐sputtering of A Thin Film Broadband Absorber Based on Self‐Organized Plasmonic Cu Nanoparticles
- 2022A thin-film broadband perfect absorber based on plasmonic copper nanoparticlescitations
- 2021Heterostructure-based devices with enhanced humidity stability for H2 gas sensing applications in breath tests and portable batteries
- 2021Heterostructure-based devices with enhanced humidity stability for H2 gas sensing applications in breath tests and portable batteriescitations
- 2020Single CuO/Cu2O/Cu Microwire Covered by a Nanowire Network as a Gas Sensor for the Detection of Battery Hazardscitations
- 2020Facile fabrication of semiconducting oxide nanostructures by direct ink writing of readily available metal microparticles and their application as low power acetone gas sensorscitations
- 2019Electron Beam Effects on Oxide Thin Films—Structure and Electrical Property Correlationscitations
- 2019The impact of O2/Ar ratio on morphology and functional properties in reactive sputtering of metal oxide thin filmscitations
- 2019Electron beam effects on oxide thin films - structure and electrical property correlationscitations
- 2019Pathways to Tailor Photocatalytic Performance of TiO2 Thin Films Deposited by Reactive Magnetron Sputteringcitations
Places of action
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article
Electron Beam Effects on Oxide Thin Films—Structure and Electrical Property Correlations
Abstract
<jats:title>Abstract</jats:title><jats:p><jats:italic>In situ</jats:italic> transmission electron microscope (TEM) characterization techniques provide valuable information on structure–property correlations to understand the behavior of materials at the nanoscale. However, understanding nanoscale structures and their interaction with the electron beam is pivotal for the reliable interpretation of <jats:italic>in situ</jats:italic>/<jats:italic>ex situ</jats:italic> TEM studies. Here, we report that oxides commonly used in nanoelectronic applications, such as transistor gate oxides or memristive devices, are prone to electron beam induced damage that causes small structural changes even under very low dose conditions, eventually changing their electrical properties as examined via <jats:italic>in situ</jats:italic> measurements. In this work, silicon, titanium, and niobium oxide thin films are used for <jats:italic>in situ</jats:italic> TEM electrical characterization studies. The electron beam induced reduction of the oxides turns these insulators into conductors. The conductivity change is reversible by exposure to air, supporting the idea of electron beam reduction of oxides as primary damage mechanism. Through these measurements we propose a limit for the critical dose to be considered for <jats:italic>in situ</jats:italic> scanning electron microscopy and TEM characterization studies.</jats:p>