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article
Exceeding conventional resolution limits in high-resolution transmission electron microscopy using tilted illumination and exit-wave restoration
Abstract
Tilted illumination exit-wave restoration is compared for two aberration-corrected instruments at different accelerating voltages. The experimental progress of this technique is also reviewed and the significance of off-axial aberrations examined. Finally, the importance of higher order aberration compensation combined with careful correction of the lower order aberrations is highlighted. © 2010 Microscopy Society of America.