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Publications (6/6 displayed)
- 2005Bottom electrode crystallization of Pb(Zr, Ti)O-3 thin films made by RF magnetron sputteringcitations
- 2004Bottom electrode crystallization method for heat treatments on thin filmscitations
- 2003Barium metaplumbate thin film electrodes for ferroelectric devicescitations
- 2003Simple method for crystallizing ceramic thin films using platinum bottom electrodes as resistive heating elementscitations
- 2003Pulsed laser deposition of barium metaplumbate thin films for ferroelectric capacitorscitations
- 2003Deposition of bioactive glass-ceramic thin-films by RF magnetron sputteringcitations
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article
Deposition of bioactive glass-ceramic thin-films by RF magnetron sputtering
Abstract
Thin films of bioactive glass-ceramics have been deposited on titanium and silicon substrates by RF magnetron sputtering. The crystalline phases and the microstructure of the films have been characterized using XRD and SEM analysis; the main phases present were calcium-magnesium phosphates, enstatite and forsterite. The adhesion of the films on titanium has been examined by pull-off testing; the adhesion strength for as-deposited films was around 40 MPa, but after crystallization the strength dropped to about half this value due to the presence of cracks. Samples kept in simulated body fluid showed an apatite-like layer, suggesting that the films are bioactive.