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Naji, M. |
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Motta, Antonella |
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Aletan, Dirar |
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Mohamed, Tarek |
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Ertürk, Emre |
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Taccardi, Nicola |
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Kononenko, Denys |
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Petrov, R. H. | Madrid |
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Alshaaer, Mazen | Brussels |
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Bih, L. |
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Casati, R. |
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Muller, Hermance |
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Kočí, Jan | Prague |
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Šuljagić, Marija |
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Kalteremidou, Kalliopi-Artemi | Brussels |
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Azam, Siraj |
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Ospanova, Alyiya |
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Blanpain, Bart |
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Ali, M. A. |
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Popa, V. |
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Rančić, M. |
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Ollier, Nadège |
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Azevedo, Nuno Monteiro |
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Landes, Michael |
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Rignanese, Gian-Marco |
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Maguire, Paul
in Cooperation with on an Cooperation-Score of 37%
Topics
Publications (22/22 displayed)
- 2023A Single‐Step Process to Produce Carbon Nanotube‐Zinc Compound Hybrid Materialscitations
- 2021Carrier extraction from metallic perovskite oxide nanoparticlescitations
- 2021Understanding plasma–ethanol non-equilibrium electrochemistry during the synthesis of metal oxide quantum dotscitations
- 2020The analysis of dissolved inorganic carbon in liquid using a microfluidic conductivity sensor with membrane separation of CO2citations
- 2019Nanostructured perovskite solar cells
- 2018Zero-dimensional methylammonium iodo bismuthate solar cells and synergistic interactions with silicon nanocrystalscitations
- 2018Microplasma-assisted electrochemical synthesis of Co3O4 nanoparticles in absolute ethanol for energy applicationscitations
- 2017Zero-dimensional methylammonium iodo bismuthate solar cells and synergistic interactions with silicon nanocrystalscitations
- 2017Charge carrier localised in zero-dimensional (CH 3 NH 3 ) 3 Bi 2 1 9 clusterscitations
- 2017Charge carrier localised in zero-dimensional (CH3NH3)3Bi219 clusterscitations
- 2017Charge carrier localised in zero-dimensional (CH3NH3)3Bi219 clusterscitations
- 2017Charge carrier localised in zero-dimensional (CH3NH3)3Bi2I9 clusterscitations
- 2011Structural and surface energy analysis of nitrogenated ta-C filmscitations
- 2009Electrical and Raman spectroscopic studies of vertically aligned multi-walled carbon nanotubes.citations
- 2009Substrate effects on the microstructure of hydrogenated amorphous carbon filmscitations
- 2007Intrinsic mechanical properties of ultra-thin amorphous carbon layerscitations
- 2006Measuring the thickness of ultra-thin diamond-like carbon filmscitations
- 2004Platelet adhesion on silicon modified hydrogenated amorphous carbon films.citations
- 2001Electrical characteristics of nitrogen incorporated hydrogenated amorphous carboncitations
- 2001Intrinsic stress measured on ultra-thin amorphous carbon films deposited on AFM cantileverscitations
- 2001The insulating properties of a-C:H on silicon and metal substratescitations
- 2000Nitrogen doping of amorphous DLC films by rf plasma dissociated nitrogen atom surface bombardment in a vacuumcitations
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article
Intrinsic stress measured on ultra-thin amorphous carbon films deposited on AFM cantilevers
Abstract
Ultra-thin amorphous carbon films were deposited onto atomic force cantilevers by plasma enhanced chemical vapour deposition. High magnification scanning electron micrographs at 30 kV reveal that the AFM tip is not affected by the deposition but its radius is broadened by the presence of the coating. Energy dispersive X-ray analysis at 4 kV shows that the film mostly coats one side of the lever, resulting in a bending of the cantilever, readily observable by scanning electron microscopy. This deformation is elastic and is caused by an internal compressive stress of 2.60 and 2.54 GPa, respectively, for 20-nm and 110-nm-thick films. After 15 at.% Si incorporation, these stresses are reduced to 0.97 and 0.78 GPa. It is believed that the increased hydrogenation upon silicon addition causes a loosening of the carbon network structure and is, therefore, responsible for the observed stress relief.