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Libassi, A.
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Publications (2/2 displayed)
- 2000Determination of bonding in amorphous carbons by electron energy loss spectroscopy, Raman scattering and X-ray reflectivitycitations
- 2000Density, sp<SUP>3</SUP> fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopycitations
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article
Determination of bonding in amorphous carbons by electron energy loss spectroscopy, Raman scattering and X-ray reflectivity
Abstract
X-ray reflectivity (XRR) and Raman scattering are developed as non-destructive methods to find the density and sp(3) content of unhydrogenated and hydrogenated amorphous carbon films. An empirical relationship is found to derive the sp(3) fraction from visible Raman spectra, while ultraviolet (UV) Raman is able to directly detect sp(3) sites. The sp(3) fraction and density are linearly correlated in amorphous carbon (a-C) and hydrogenated amorphous carbon (a-C:H) films.